1 / 9

Free-Space Communication for Autonomous Sensors using Grating Light Modulators

Free-Space Communication for Autonomous Sensors using Grating Light Modulators. David R. Pedersen, Michael H. Guddal University of California, Davis Olav Solgaard Stanford University. Outline. Summary of Year 1 Milestones Developed, modeled and characterized GLM

uriah
Download Presentation

Free-Space Communication for Autonomous Sensors using Grating Light Modulators

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Free-Space Communication for Autonomous Sensors using Grating Light Modulators David R. Pedersen, Michael H. Guddal University of California, Davis Olav Solgaard Stanford University

  2. Outline • Summary of Year 1 Milestones • Developed, modeled and characterized GLM • Demonstrated free-space optical link using GCC modulator • Improvements in GLM design • Reduce angle dependence and dispersion • Increase damping • No interference with plasma => “buried” GLM • Year 2 Milestones • Integrate micromachined GLM with on-board power • Buried GLM, through-the-wafer interconnects, wafer bonding

  3. GCC Communication Link

  4. High Contrast GLM Reduced Angle dependence Reflective State Diffractive State Increased damping

  5. Full-wafer Grating Light Modulators Period: 10 Gap: 10um Beam Width: 10um Substrate/Beam Spacing: 2um Beam Length: 200um to 600um Beams: Doped low stress polysilicon Insulating Material: PSG

  6. Lay out Each line: 2mm open-circuit region etched to the substrate and aligned with the front Front Backside contact to the substrate Back

  7. Buried Grating Light Modulators - Technology Development DRIE trenches for interconnects and corner-cube reflectors Oxidation-smoothed TIR surface AR-coating GLM aperture

  8. Autonomous Sensor Wafer with Buried GLMs

  9. Conclusion • Met Year 1 Milestones: • Fabricated and tested micro-machined GLMs • Demonstrated free-space communication • Full-wafer fabrication process • Year 2 Milestones • Integrate micromachined GLMs with on-board power, sensors, and electronics sources • Technology development • Buried GLMs • Through-the-wafer interconnects • Wafer bonding

More Related