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igc ™ II

igc ™ II. Modular Surface-mount Design. Features of Modular Gas Systems. Reduces Space Requirements Facilitates Easy Assembly and Maintenance Reduces Inventory. igc ™ II. Simplifies Design and Assembly Reduces Potential Leak Points Reduces Panel Weight Complies with SEMI-PR3.1

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igc ™ II

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  1. igc™ II Modular Surface-mount Design

  2. Features of Modular Gas Systems • Reduces Space Requirements • Facilitates Easy Assembly and Maintenance • Reduces Inventory

  3. igc™II • Simplifies Design and Assembly • Reduces Potential Leak Points • Reduces Panel Weight • Complies with SEMI-PR3.1 • Supported by Local Swagelok Distributors • Competitive Cost of Ownership

  4. Modular Technology 1.53 in. 1.23 in. (38.9 mm) (31.2 mm)

  5. Surface-mount Seals 3 port 2 port 1 port C-ring Gasket Assembly For Drop-down components Open ArchitectureSurface-mount C-ring Gaskets

  6. igc™II Construction Igc Panel

  7. igc™II Construction Substrate Assemblies

  8. igc™II Construction Surface-mount Components

  9. igc™II Construction Substrate Flow Components Substrate Channel

  10. igc™II Construction Substrate Assemblies

  11. igc™II Construction Igc Panel

  12. igc™II Construction Manifold Flow Components

  13. Mounting Components Base Plate igc™II Construction

  14. Substrate Layer Substrate Assembly

  15. Substrate Layer Surface-mount Components

  16. Substrate Flow Components Substrate End Connector Drop-down MFC Connectors Surface-mount Connector

  17. Substrate Layer Substrate Clip Substrate Channel Substrate Component

  18. Substrate Layer Lock-down plate Substrate Channel

  19. Substrate Layer C-ring Gasket Substrate Channel

  20. Substrate Layer Surface-mount Component Substrate Channel

  21. Substrate Layer

  22. Substrate Layer Load Bearing Insert

  23. Manifold Clip Manifold Component Manifold Channel Manifold Layer

  24. Manifold Layer Manifold Assembly

  25. Manifold Layer Butt Weld End Connection Butt Weld End Connection

  26. Manifold Ports Manifold Layer

  27. Manifold Plug Manifold Layer

  28. Cap Manifold Layer

  29. Cap Screws Substrate Channel Manifold Clip Manifold Channel Manifold Component Manifold Layer

  30. Locating Rib Manifold Layer

  31. Manifold Layer Parallel Manifold

  32. Manifold Layer Parallel Manifold Jumper Component

  33. Support Layer Foot Block Mid-line Support Block Foot Block

  34. Accessories Cartridge Style Heater Clip

  35. Vertical Port Mass Flow Controller Conversion Plates Cap Accessories

  36. igc™II

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