Hazard Assessments at Duffield Hall Cornell s Nanoscale Research Facility DSR Roundtable William Bader May 1

2. Overview Duffield Hall Background See Presentation from 12/06 DSR Roundtable CNF Cleanroom Video Hazard Assessment in Safety & Environmental Management One of Many Programs (Training, Inspections, SOPs, etc.) Used to Identify Needed Controls (Engineering & Operational) Captures Current Process/Configuration and Planned Actions The Assessment Process How It Came About Participants Forms Review Follow-Up Lessons Learned What Worked Well Recommendations

3. Hazard Assessment POSER: Pre-Operational Safety & Environmental Review How It Came About Environmental Impact Statement Requirement Proposed by Knowledgeable Lab Manager Embraced by City Reviewers Consultant Contracted to Define and Facilitate When It Is Done Before Any Process or Equipment With Possible Hazard is Put In Use Participants Primary Faculty Member, Staff Member, or Graduate Student Presents Other Users as Appropriate Shared Lab Users Together Facility Director Coordinates Safety Committee Review EHS and Outside Consultants as Appropriate

4. The Assessment Process

5. Equipment Form Header Documentation & Revision Control Overview of Tool Operation, Installation, & Production Rates One Sentence Qualitative Description of Primary Hazard General Reason for POSER Special Permits or Approvals Facilities Requirements CDA, N2, Vac, Pump Exhaust, RODI, PCH, Gasses, Power, EMI, Drain, etc. Chemical Use Information Phase, Use Rates, Storage Capacity, Amount to Drain/Air, Toxic, Flammable, etc. Generic Chemical List and Percentages Chemical Process Details Pressurized, Open Baths, Individually Regulated, SOPs, PPE, Reaction, etc.

6. Equipment Form (continued) Environmental Process Details Air Permit, Exhaust, Interlocks, Scrubber, VOC, Biohazard/Disposal, Hazard & Non-Hazard Waste In Normal And Maintenance Operation Equipment Process Details SEMI S2, Start Up/Shut Down Procedures & Hazards, Tool Specific Training, PPE For Use & Service, Emergency Stops, High Voltage, RF, Guarding, Maintenance Records, Vibration, Etc. Industrial Hygiene Exposure Issues Off-hour Use Restrictions, Buddy System, High Noise, X-ray, Radiation, Health Surveillance, Monitoring, Ergonomics Emergency Requirements Eyewashes & Showers, Fire Suppression, Gas Monitoring, Alarms, ERT Documents What-If Mini Risk Assessment & Conclusion

7. General Chemistry Form and Form Information Same As Equipment Form Except: Remove Equipment References Modified Chemical Use Information By Chemical Class (Similar Hazards) With Use & Storage Amounts, Examples Highlight Any Used: In Large Volumes In Open Tanks With Unusual Hazards (Pyrophoric, Explosive, Toxic, Water Reactive, Radiation) Available Information Includes: Definitions From OSHA Hazard Communication Standard Explanation Of What Is Requested In Each Entry on Form Over 100 Completed And Approved Examples

8. The Assessment Process (Continued)

9. Lessons Learned What Works Well Provide Examples and Annotated Form to Equipment or Process Owner Pre-Distribution of Initially Completed Forms Identify Expert Required and Arrange for Attendance Schedule Related Labs in Same Review Session Use Same Review Team for Consistency Peer Review is Better Received and Provides Side Benefits Separate Facilitator and Scribe On-line Form Completion During Review Provide Lunch Recommendations Identify Policies and Rules Up Front Communicate Multiple Ways What is Required Simplify/Modify Form for Your Unique Needs Have First Owners Communicate to Others On Ease of Review

10. THE END

11. BACK-UP SLIDES

12. Duffield Hall Goals Optimum Equipment/Process Performance Class 1000 Cleanroom Special Temperature & Humidity Controls Minimal Vibration and EM Interference Specialty Utilities & Systems Flexibly Accommodate Diverse Use Research Centers Faculty Labs Shared & Segregated Areas Instruction Offices Event and Public Spaces Encourage Collaboration and Interaction Minimize Energy Use World Class Safety & Environmental Controls

13. Cleanroom Labs

14. Offices and Public Spaces

15. Safety and Environmental Controls Rationale Protect Occupants and Public Community Expectations Regulatory Requirements Planning Environmental Impact Statement MOU with Faculty & Center Directors Cornell Management System Engineering Controls Controlled Access to Areas With Hazards Special Storage Areas and Transport Paths Exhaust, Monitoring, Control, and Alarm Systems Operational Controls

16. Management And Operation Protocols Emergency Response Plan Building System Alarm Actions Training EHS Lab Safety and Chemical Waste Disposal Orientation and Cleanroom/Center Specific Training Focused Training for Different Groups and Hazards Plans, Policies and Procedures SOPs Lab Inspections Hazard Assessment All Reviews Action Items List Created and Worked