1 / 2

1. 請說明電器設備進行維修時電源箱之處置方式 ( 詳述內容 10%) 2. 為何須以燃燒式處理設備進行 CF4 廢氣處理 ?(10%)

班級 姓名 學號. 1. 請說明電器設備進行維修時電源箱之處置方式 ( 詳述內容 10%) 2. 為何須以燃燒式處理設備進行 CF4 廢氣處理 ?(10%) 3. 請以化學加熱槽說明溫度安全互鎖系統 ( 包含圖及說明 20%) (set point of normal condition:70 ℃/ set point of warning:80 ℃/ set point of alarm:90 ℃/ set point of over temperature switch:100 ℃).

yael-kirby
Download Presentation

1. 請說明電器設備進行維修時電源箱之處置方式 ( 詳述內容 10%) 2. 為何須以燃燒式處理設備進行 CF4 廢氣處理 ?(10%)

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. 班級 姓名 學號 1.請說明電器設備進行維修時電源箱之處置方式(詳述內容10%) 2. 為何須以燃燒式處理設備進行CF4廢氣處理?(10%) 3.請以化學加熱槽說明溫度安全互鎖系統(包含圖及說明20%) (set point of normal condition:70℃/ set point of warning:80℃/ set point of alarm:90℃/set point of over temperature switch:100℃)

  2. 班級 姓名 學號 4.造成有by pass管線之燃燒式local scrubber回火之原因 及降低風險方法(包含可能性及嚴重性20%)。(圖及說明)(答案寫於後) 5.請說明於使用NF3之HDPCVD機台pumping line中於check valve及bellow 處起火之原因及避免方法(20%)(答案寫於後) 6.請寫出以下之英文全名(20%) a.環境工程系(4%) b.SEMI S2(5%) c.SPTF(4%) d.EMO(3%) e.mg/L(4%) 7.課後感想(5%)

More Related