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November 2004

Low Hanging Fruit Low Cost Energy Efficiency Opportunities in Cleanrooms. November 2004. Free Cooling. Psychrometric Chart for San Jose. 3,200 Hours Minimum. Free Cooling Configuration #2 - Series PCW Only. An Innovative Layout Possibility. Dual Temperature Chilled Water Plant.

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November 2004

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  1. Low Hanging FruitLow Cost Energy Efficiency Opportunities in Cleanrooms November 2004

  2. Free Cooling

  3. Psychrometric Chart for San Jose 3,200 Hours Minimum

  4. Free Cooling Configuration #2 - Series PCW Only

  5. An Innovative Layout Possibility Dual Temperature Chilled Water Plant

  6. Pumping Problems

  7. Current Primary - Secondary Pumping

  8. VFD Chillers

  9. Lower Chiller Condenser Water Temperatures

  10. Use Variable Speed Drives • Good for fans, even better for pumps, which are typically controlled and balanced by throttling

  11. Remove Booster Pumps and close bypasses

  12. Close 3-way Valves • B8 has a highly variable load due to air washer capacity, yet a constant flow

  13. Aim for Highest Possible CHW Delta T

  14. Exhaust Optimization • Tool exhaust can be optimized via tracer gas or other accepted test methods • In most cases tool exhaust can be reduced 10 – 50% • Fume containment testing required for optimization also verifies worker safety • Case Study Savings Opportunity:

  15. When replacing broken or worn out equipment Select the most efficient option • Efficiency often has little relationship to cost of equipment • E.G. ----- • Pumps • Electric Motors • Fans • etc.

  16. Variable Speed Drive Compressors and waste heat regen dryers • VSD Compressors address the cycling problem

  17. Commissioning / Retrocommissioning • Retrocommission - on a regular basis commission key components of system • E.G. - Develop standard tests for key control loops

  18. Effect - Supply Air Temperature is Deficient Design Supply Air Temp is 55 deg F with no SAT reset

  19. Cause Chilled Water Temperatures

  20. Commission to avoid cycling

  21. Control Optimization

  22. THANK YOU! Rumsey Engineers, Inc. 99 Linden Street Oakland, CA 94607 (510) 663-2070 www.RumseyEngineers.com prumsey@RumseyEngineers.com

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