浙江大学研究生课程 — 纳米技术与系统

1. 浙江大学研究生课程—纳米技术与系统 第十章 扫描探针显微镜技术 章海军 浙江大学 信息学部 光电信息工程学系 2014-03-24

2. 第十章 扫描探针显微镜技术 • 10.1从STM/AFM到扫描探针显微镜 • 10.2 SPM家族 • 10.3 摩擦力显微镜(FFM) • 10.4静电力显微镜(EFM) • 10.5磁力显微镜(MFM) • 10.6扫描离子电导显微镜(SICM) • 10.7扫描近场光学显微镜(SNOM) • 10.8光子扫描隧道显微镜(PSTM) • 10.9 SPM总结

3. 1986年 宾尼&夸特 原子力显微镜 扫描探针显微镜 AFM 0. 1 nm SPM CNT AFM CNT STM 10.1 从STM/AFM到SPM家族 1932年 鲁斯卡&克诺尔 1982年 宾尼&罗雷尔 扫描隧道显微镜 电子显微镜 STM 0.01 nm SEM TEM

4. STM基础：量子力学—隧道效应

5. STM原理

6. 原子的STM图像 —— 直径约 0.3 nm

7. 原子力显微镜Atomicforce microscopy 1986, Binnig, Quate, Gerber 1989, The first commercially available AFM

8. AFM的光束偏转法Beam deflection method

9. Basic setup of AFM

11. 相互 作用 隧道电流、原子力、摩擦力、静电力、磁力、热、光子流、离子流（离子电导）、电容等。 10.2 扫描探针显微镜家族 The family of scanning probe microscope, SPM 探针 Probe 相互作用 Interaction 样品 Sample

13. AFM EFM CSPM MFM SICM CSTM LFM CAFM FFM SNOM STM PSTM STS SThM Standard modes Optional modes SPM Family Tree

14. 10.3 摩擦力显微镜(FFM) Principle of Friction Force Microscope

19. FFM的二维PSD光电检测电路系统

20. FFM的应用实例 AFM图像 FFM图像

21. AFM图像 FFM图像

22. 摩 擦 力 的 影 响 30/89

23. 摩 擦 力 的 影 响

24. AFM图像 FFM的功效及应用图解

25. FFM的功效及应用图解 FFM图像

26. 阴影区代表摩擦特性不同

27. 10.4 静电力显微镜(EFM)

28. 静电微探针 Typical tip radius better than 7 nm；  Electrical con- ductive coating  High mechanical Q-factor for high sensitivity. 2. The tip of Electrostatic Force Microscope

29. Cantilever length: 225 m Tip radius: 7 nm～ Force Constant: 2.8N/m Resonance freq: 75 kHz Price in USD: $50/tip An overall metallic coating (Pt-Ir5) on both sides of the cantilever increasing the electrical con-ductivity of the tip. The Pt-Ir5 coating is an approxi-mately 25 nm thick double layer of chromium and platinum- iridium5. The tip side coating enhances the conductivity of the tip and allows electrical contacts.

32. AFM 图像 EFM图像 40/89

33. 静电力显微镜(EFM)实例 Electrostatic Force Microscopy (EFM) uses a combination of TappingMode™, LiftMode™ and a conductive tip to gather information about the electric field above a sample. Each line of the sample is first scanned in TappingMode operation to obtain the sample topography. The topographic information is stored and retraced with a user- selectable height offset in LiftMode, during which the electrical data is collected. Typical lift heights in EFM range from 20-80 nm.

35. 10.5 磁力显微镜(MFM) 磁性微探针。探测记录样品表面的磁分布。如磁盘、磁带。

36. The AFM operated in the non-contact mode with a magnetic cantilever detects a force gradient (F') containing information from both the surface structure and surface magnetization. F' = F'surface+F'magnetic Signals from surface topography dominate at close distances to the surface while,at greater distances from the surface (typically beyond 100 nm), the magnetic signal dominates. Consequently, depending on the distance between the surface and the tip, normal MFM images may contain a combination of topography and magnetic signals. Though it is useful to topographically locate where the magnetic domains are, sometimes it is more advantageous to completely separate the two signals from each other. F' = F'surface+F'magnetic

37. Magneticforce microscopy  Local magnetic properties  AFM + tip covered by a layer of ferromagnetic material with specific magnetization

38. Tip preparation of MFM（a） 材 料：单晶硅 形 状：圆锥形 针尖高度：7 m 针尖曲率：10 nm 圆 锥 角：10

39. Tip preparation of MFM（b） A typical example is shown in the picture. A carbon contamination needle is grown on top of the pyramidal tip of a commercial Si3N4 AFM cantilever. The needle is covered afterwards from one side with a thermally evaporated 15 nm thick Co80Ni20 film to make it sensitive for MFM mea- surement. Orientation of the needle is chosen to be approximately 10º with respect to the can- tilever plane.

40. MFM的应用实例

41. 磁力显微镜(MFM)实例 Magnetic Force Microscopy (MFM) uses a combination of TappingMode™, LiftMode™ and a properly prepared tip to gather information about the magnetic field above a sample. Each line of the sample is first scanned in TappingMode operation to obtain the sample topography. The topographic information is stored and retraced with a user selectable height offset in LiftMode, during which the magnetic data are collected. Typical lift heights in MFM range from 20- 100 nm.

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44. 毛细管微探针 I micropipette capillary V metal electrode (anode) bath electrolyte sample (cathode) microstructures 10.6 扫描离子电导显微镜（SICM）

45. 扫描离子电导显微镜 Scanning Ion-conductance Microscope P. K. Hansma, B. Drake, O.Marti Science, 1989, 243, 641-643

46. The SICM was originally designed to image the topography of non-conducting surfaces that are covered with electrolytes by using an electrolyte-filled micropipette probe tip. As the tip approaches towards the sample surface in a reservoir of electrolytes, the ion flow through the opening of the tip is blocked at short distances between the tip and the surface, thus decreasing the ion conductance.When the tip scans over the surface, ion conductance changes with the contour of the sample surface. SICM can resolve features as small as the inner diameter of the tip.One more promising application of SICM is to image the local ion currents coming through the surfaces of the biological samples.

47. 毛细管 毛细管微探针制备 电热丝 玻璃罩 重块 开关

48. 毛细管 毛细管微探针制备 电热丝 玻璃罩 重块 开关

49. 10-1 毛细管 毛细管微探针制备 电热丝 玻璃罩 重块 开关

50. 附:基于SICM毛细管微探针的微加工方法 I micropipette capillary V metal electrode (anode) bath electrolyte sample (cathode) microstructures