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Advanced CMOS SPC Chart Creation

Advanced CMOS SPC Chart Creation. EMCR650 Process Improvement Project Mike Hathorn. Why SPC Charts?. To keep process in control Out of control points can trigger alarms to warn engineers Can be used to estimate etch or deposition rates. Example SPC Chart. What Was Done.

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Advanced CMOS SPC Chart Creation

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  1. Advanced CMOS SPC Chart Creation EMCR650 Process Improvement Project Mike Hathorn ADV-CMOS SPC Chart Creation

  2. Why SPC Charts? • To keep process in control • Out of control points can trigger alarms to warn engineers • Can be used to estimate etch or deposition rates ADV-CMOS SPC Chart Creation

  3. Example SPC Chart ADV-CMOS SPC Chart Creation

  4. What Was Done • Created 3 new SPC charts for ADV-CMOS process • Pad oxide • Nitride • Gate oxide • Documented detailed procedure on creation of charts ADV-CMOS SPC Chart Creation

  5. Creating SPC Charts, Not So Easy • MESA • Create query to pull data • Create document to link chart to • Edit process instructions to link document • Quality Analyst • Resident on J: drive (MEBES PC) – cannot be accessed from MESA • Create 4 files to run and display chart • .DAT - Data file to store data • .HED – header file to setup chart display and spec limits • .RUN - Run file to execute query • .PPS – powerpoint file to display chart through MESA ADV-CMOS SPC Chart Creation

  6. Important Considerations • Keep consistent naming convention • Queries: SPCADV_GOX; SPCADV_NTD • Documents: SPCADVGOX; SPCADVNTD • Perform tasks in order • MESA: • Create and test query • Create document • Link document to instructions • QA: (can be done first or last) • Create and edit QA files ADV-CMOS SPC Chart Creation

  7. Creation of a SPC Chart • Sign-on to MESA • User: STUDENT • Password: NIGHTSHIFT • User sign on • User: ENGINEER • Password: ******* ADV-CMOS SPC Chart Creation

  8. Engineering Menu ADV-CMOS SPC Chart Creation

  9. Creating a Query • Select option 20 – Query processing menu • Since charts exist for previous device generations, existing queries can be copied and edited • Option 3 – copy existing query • F4 for list • Library: QGPL • Rename SPCADV_??? ADV-CMOS SPC Chart Creation

  10. Copy existing query Rename Creating a Query ADV-CMOS SPC Chart Creation

  11. Editing a Query • Select option 2 – edit • Select option 1 – select records • Change MDFSTEP to step number (ie. 30) • Insert line (F9) to select only advanced lots • AND MDPRC EQ ‘ADV-CMOS’ • F3 to exit • Exit the query • Save definition: Y • Run Option : 1 (interactively) • <Enter> to run query and exit ADV-CMOS SPC Chart Creation

  12. Check step # Add test Edit query Select records Check step # and add test Editing a Query ADV-CMOS SPC Chart Creation

  13. Exit Query Note: --Using F12, cancel or F3, exit will only keep switching between query screens Press <Return> ADV-CMOS SPC Chart Creation

  14. Creating a Document • Return to main menu • Select option 2 – Files/Tables Menu • Select option 1 – Files/Tables Maintenance Menu • Select option 13 – Document Master Maintenance • Option 1 create • Name: SPCADV????? • Folder: J:\QA\ADVCMOS • Name: ?????.pps • Access Code: POWERPNT ADV-CMOS SPC Chart Creation

  15. Files/Tables Menu Files/Tables Maintenance Menu Document Master Maintenance Fill in Values Creating a Document ADV-CMOS SPC Chart Creation

  16. Link Document to Instructions • Return to Master Files/Table Maintenance menu • Select option 3 – Process Master Maintenance • Select option 2 – change • Process: ADV-CMOS • Revision: 150 • <Return> • Page Down to step • Enter MI (Maintain Instructions) • <Return> • Use option 2 – change on “See SPC Chart” instruction • Document ID: SPCADV??? ADV-CMOS SPC Chart Creation

  17. Link Document to Instructions ADV-CMOS SPC Chart Creation

  18. Change this line Link Document to Instructions ADV-CMOS SPC Chart Creation

  19. Setup Quality Analyst Files • Create or copy the following 4 files in the ADVCMOS directory • .HED • .RUN • .DAT • .PPS • Rename to your SPC Chart if necessary • i.e. NITRIDE.DAT • Only .HED and .RUN file will need to be modified ADV-CMOS SPC Chart Creation

  20. Edit .HED file Document name Target USL LSL ADV-CMOS SPC Chart Creation

  21. Edit .RUN file Change 3 lines to correct .DAT file path ADV-CMOS SPC Chart Creation

  22. .DAT file ADV-CMOS SPC Chart Creation

  23. Conclusion • 3 SPC charts for the advanced CMOS process have been successfully created • Procedure has been documented within this presentation • Creation of SPC charts for additional steps can be done in methodical manner • New charts should take ~20 min to create ADV-CMOS SPC Chart Creation

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