1 / 29

RECX

RECX. Thin film metrology. XRR Film thickness Roughness Density. Phi-scan In plane orientation. GIXRD Enhance material probed Phase Stress Depth profiling. Rocking curve Miscut Orientation. Polar plot Texture. HRXRD / RSM Texture Strain Orientation. XRR Film thickness

zofia
Download Presentation

RECX

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. RECX Thin film metrology

  2. XRR • Film thickness • Roughness • Density • Phi-scan • In plane orientation • GIXRD • Enhance material probed • Phase • Stress • Depth profiling • Rocking curve • Miscut • Orientation • Polar plot • Texture • HRXRD / RSM • Texture • Strain • Orientation

  3. XRR • Film thickness • Roughness • Density • Phi-scan • In plane orientation • GIXRD • Enhance material probed • Phase • Stress • Depth profiling • Rocking curve • Miscut • Orientation • Polar plot • Texture • HRXRD / RSM • Texture • Strain • Orientation

  4. XRR (X-ray reflectometry) • Reflectivity as function of angle to obtain information on: • Film thickness • Surface roughness • Density

  5. XRR (X-ray reflectometry) Scattering from surfaces and interfaces at low angles, ~0-8o Variations in electron density arise from film thickness, roughness and density which can be determined for each layer Q k k’ ~50nm LaNiO3 on SrTiO3 ~50nm LaNiO3 on SrTiO3 Density Thickness Scattering occurs from variations in electron density Roughness Fouriertransform Electron density Refined parameters: LaNiO3 Thickness 48.98nm “ Roughness 0.30 nm “ Density 7.05 g/cm3 A surface layer of 1.4nm is also required to fully explain the results

  6. XRR (X-ray reflectometry) Layered thin films of Eu2O3 and TiO2 grown by ALD as conversion material with the aim of controlling the Eu-Eu distance.

  7. XRR (X-ray reflectometry) Layered thin films of Eu2O3 and TiO2 grown by ALD as conversion material with the aim of controlling the Eu-Eu distance. The double layer thicknesses: 10N = 7.5 Å 20N = 15.9 Å 50N = 29.1 Å Half the double layer thickness of the 10N sample, 3.8 Å, is approx the same as the shortest Eu – Eu distance in cubic Eu2O3, 3.6 Å

  8. XRR (X-ray reflectometry)

  9. XRR • Film thickness • Roughness • Density • Phi-scan • In plane orientation • GIXRD • Enhance material probed • Phase • Stress • Depth profiling • Rocking curve • Miscut • Orientation • Polar plot • Texture • HRXRD / RSM • Texture • Strain • Orientation

  10. GIXRD (Grazing incident x-ray diffraction) Increase the pathway through the sample Conventional q-2q

  11. GIXRD (Grazing incident x-ray diffraction) Increase the pathway through the sample GIXRD

  12. GIXRD (Grazing incident x-ray diffraction) A ZnO film of 200 nm deposited by ALD Conventional q-2q GIXRD

  13. GIXRD (Grazing incident x-ray diffraction) Depth profile analysis

  14. XRR • Film thickness • Roughness • Density • Phi-scan • In plane orientation • GIXRD • Enhance material probed • Phase • Stress • Depth profiling • Rocking curve • Miscut • Orientation • Polar plot • Texture • HRXRD / RSM • Texture • Strain • Orientation

  15. HRXRD (High-resolution x-ray diffraction) Increase the pathway through the sample

  16. HRXRD (High-resolution x-ray diffraction) • Map the reciprocal space to obtain information on: • Orientation • Strain • Texture … and a lot more…

  17. HRXRD (High-resolution x-ray diffraction)

  18. HRXRD (High-resolution x-ray diffraction)

  19. HRXRD (High-resolution x-ray diffraction)

  20. HRXRD (High-resolution x-ray diffraction) Film of NaNbO3 on LaAlO3

  21. XRR • Film thickness • Roughness • Density • Phi-scan • In plane orientation • GIXRD • Enhance material probed • Phase • Stress • Depth profiling • Rocking curve • Miscut • Orientation • Polar plot • Texture • HRXRD / RSM • Texture • Strain • Orientation

More Related