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Superalloy Ni-Al specimens produced by vapor phase aluminization of LIGA Ni micro-components

Development of Ni-base Superalloys for MEMS Applications Kevin J. Hemker , Johns Hopkins University, DMR 0806753. Superalloy Ni-Al specimens produced by vapor phase aluminization of LIGA Ni micro-components.

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Superalloy Ni-Al specimens produced by vapor phase aluminization of LIGA Ni micro-components

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  1. Development of Ni-base Superalloys for MEMS ApplicationsKevin J. Hemker, Johns Hopkins University, DMR 0806753 Superalloy Ni-Al specimens produced by vapor phase aluminization of LIGA Ni micro-components • MEMS micro-devices typically do not operate above 100°C because metallic MEMS materials like LIGA Ni suffer from poor thermal stability and have very poor elevated temperature properties. • Bulk Ni-base superalloys are employed in land and aero based turbines at 1,000°C because of their two-phase microstructure but cannot be shaped on the micro-scale. • This project has realized the development of MEMS Ni-base superalloys through development of three processing routes : • LIGA based electrocodepositionof Ni with nanoscale Al powders • Vapor phase aluminizationof LIGA micro-structures • Direct sputtering of conventional Ni-base superalloys 18 at.% Al 0 at.% Al Sputtered Inconel 718 nanocrystalline thin films JHU Personnel: Kevin Hemker (PI); Devin Burns (PhD); Alex Caffee (ug); Devin Cornish + Joshua Greenspan(HS) KIT Personnel: JarirAktaa (co-PI); Klaus Bade (co-PI); Michael Teutsch (PhD)

  2. Development of Ni-base Superalloys for MEMS ApplicationsKevin J. Hemker, Johns Hopkins University, DMR 0806753 Baltimore Polytechnic Students Hopkins / KIT Exchange • Developed automated 3D surface tomography system with graduate student guidance • Shown below presenting their results at Poly’s Ingenuity Mathematics & Science Symposium Devin Cornish (2011) Joshua Greenspan (2012)

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