Electroless multilayer metal films plating on silicon
Electroless 0,3 µm Au coating on thick Ni, deposited on Si. a b a – surface morphology and Auger profiling spectroscopy b – cross section morphology and EDS analysis. Vorobyova T. N. a , Reva O. V. b , Kobets A. V. a , Vrublevskaya O. N. a.
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