XP62X Piezo Stage Nanopositioning Stages

Jan 29, 2021

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Key Specifications/Special Features: Type:XP-620.1SL, XP-621.1SL, XP-623.1SL XP-620.1OL, XP-621.1OL, XP-623.1OL Active axes: X Travel: 12~48um Closed-loop travel: 17~68um Open-loop resolution: 0.15~0.5nm Closed-loop resolution 0.5~2nm Closed-loop linearity: 0.1%F.S. Closed-loop repeatability: 0.05%F.S. Stiffness in motion direction: 40~10N/um Unloaded response frequency: 4.2~2.5kHz Response frequency @120g: 2.8~2.0kHz Push/pull force capacity in motion direction: 480/160N Load capacity: 100N El.capacitance: 1.8~7.2uF Weight: 0.15~0.45kg Cable length: 1.5m Cable way: side lead

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XP62X Piezo Stage Nanopositioning Stages

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Harbin Core Tomorrow Science & Technology Co., Ltd. sjl@coremorrow.com http://www.coremorrow.com/en/
sjl@coremorrow.com http://www.coremorrow.com/en/ Harbin Core Tomorrow Science & Technology Co., Ltd.
sjl@coremorrow.com Harbin Core Tomorrow Science & Technology Co., Ltd. http://www.coremorrow.com/en/
sjl@coremorrow.com http://www.coremorrow.com/en/ Harbin Core Tomorrow Science & Technology Co., Ltd.