アトラスシリコン半導体飛跡検出器： ATLAS Silicon-strip Tracking Detector

1. SCT-v1, http://atlas.kek.jp/sub/poster/index.html ATLAS SCT Collaboration: Australia, Czech, Germany, Japan, Netherlands, Norway, Poland, Russia, Slovania, Spain, Sweden, Switzerland, UK, US, CERN Specifications (Barrel part only) Sensor: 8448 Sensors, 63.56 x 63.96x 0.285 mm3, p-in-n single sided strip pitch 80 mm, implant width 16-20 mm, total area = 34.4 m2 full depletion < 150V (initial), <350V (after 3x1014p/cm2) Module: 2112 modules, Stereo angle: 40 mrad TPG thermal conductor (UK), Flexible hybrid circuit (Japan) 12 ABCD chips (BiCMOS ASIC)/module, 1536 ch, 5000 bondings assembly accuracy < 5-1 mm control Cylinder: 4 cylinders, r = 30-52cm , |η|<1.4 Radiation: 3×1014 n/cm2 (10 years), Operating Temperature: -7C Fabrications: 2600 modules by 980 Japan, UK, US and Scandinavia アトラスシリコン半導体飛跡検出器：ATLAS Silicon-strip Tracking Detector 1996-2000 Testing of radiation hardness using KEK PS beams 1996-1998 Cooling test at KEK Radiation damage estimation Instrumentations at KEK clean room 2001 Final sensor design Japan provided 6000 sensors Module assembly (2001-2004) Design and fabrication of the readout hybrid High precision assembly fixtures by KEK KEK designed the flexible Cu/Polyimide circuit with Nippon Mektron LTD Hybrid assembly in Seiko Precision LTd. Automatic wire bonding, about 5000 bonding/module at Hamamatsu/Seiko 3D measurement station for alignment at Hamamatsu/Seiko. Pattern of glue points on the VHCPG base-board 3-axis dispensing workstation Assembly microscope unit for sensor alignment developed by KEK Alignment accuracy between front and back sensor planes versus module number. Best achievement among 4 regions !! Leakage current distribution after module assembly at 350 V. >95% yield, the best among 4 regions !! Japan made 980 modules Module production took full 3 years System assembly and commissioning (2004-2006) 2000.12 Module mounting robots tested by KEK 2004-05 Modules mounted on 4 cylinders at Oxford University using KEK robots 2006.5 cosmic-ray track observed at SR1 ! 2006.2 SCT-TRT docking successfully done at CERN SR1using assembly tools designed and fabricated by KEK SCT-v1, http://atlas.kek.jp/sub/poster/index.html