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ion mobility spectrometer in ltcc

2. April 9, 2003. IMAPS CII, Denver CO. Ground-Rules. Mechanical Engineer - Aerospace backgroundC-MEMS: MESO-Electrical Mechanical Systems. 3. April 9, 2003. IMAPS CII, Denver CO. Overview. Why LTCC?BSU Design/Fabrication ProcessEPA Sensor ProjectIMS DesignIMS FabricationTest Article PrototypeDevice ImagesAcknowledgements.

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ion mobility spectrometer in ltcc

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    1. 1 Ion Mobility Spectrometer in LTCC Don Plumlee, Amy Moll Boise State University M. Tam, P. Dwivedi, H.H. Hill Jr Washington State University

    2. 2 April 9, 2003 IMAPS CII, Denver CO Ground-Rules Mechanical Engineer - Aerospace background C-MEMS: MESO-Electrical Mechanical Systems

    3. 3 April 9, 2003 IMAPS CII, Denver CO Overview Why LTCC? BSU Design/Fabrication Process EPA Sensor Project IMS Design IMS Fabrication Test Article Prototype Device Images Acknowledgements

    4. 4 April 9, 2003 IMAPS CII, Denver CO Why we use LTCC? Process Low Capital Investment Quick Prototyping Electrical Integrated Passive Components High circuit density (3D Structure) Thermal High ambient temperature resistance Close match to semiconductor TCE Mechanical Machineable (Drill, Cut, Punch) in Green State. High Mechanical Strength after firing Multi-layer Structure Hermetically-sealed Package

    5. 5 April 9, 2003 IMAPS CII, Denver CO BSU Design Process 3-D Part: Internal cavities, reference planes define LTCC layers 2-D Drawing: Cross-section of part, each separate layer has associated holes, channels and 3-D Part: Internal cavities, reference planes define LTCC layers 2-D Drawing: Cross-section of part, each separate layer has associated holes, channels and

    6. 6 April 9, 2003 IMAPS CII, Denver CO BSU Fabrication Process Cut Blanks First Routing Process Use CNC milling machine Route vias, registration holes and internal cavities Fill vias Print Conductor/Resistor Patterns Collate and Laminate Second routing process Initial substrate is segmented in the un-fired state Final Assembly Segments aligned Segments bonded using Pressure Sensitive Adhesive Prevents cavity collapse during lamination Co-Fire device

    7. 7 April 9, 2003 IMAPS CII, Denver CO C-MEMS Laboratory at BSU

    8. 8 April 9, 2003 IMAPS CII, Denver CO CNC Milling Machine

    9. 9 April 9, 2003 IMAPS CII, Denver CO EPA Sensor Project Objective: Accurate Time/Space tracking of chemical migration in groundwater Collaboration between Boise State University (BSU) and Washington State University (WSU) A sensor is inserted into the soil using ground penetrometer. The sensor analyzes groundwater chemical concentrations. Data is broadcast and collected from an array of sensors in ‘real-time’.

    10. 10 April 9, 2003 IMAPS CII, Denver CO Ion Mobility Spectrometer (IMS) Detection Accuracy Distinguish different species Sensitive to ppm range Fast Small Size Fits in insertion tube Axial construction Robust

    11. 11 April 9, 2003 IMAPS CII, Denver CO IMS Schematic

    12. 12 April 9, 2003 IMAPS CII, Denver CO IMS Design Requirements Constant Electric Field (~500V/cm) Minimize Radial Diffusion Self-Contained Device Protection Hermetic Reliable Preliminary Device Dimensions (WSU) 4 cm OD maximum 2 cm ID preferred 12 cm length of Drift Tube Operational Temperature > 100ºC

    13. 13 April 9, 2003 IMAPS CII, Denver CO IMS Model Assembly

    14. 14 April 9, 2003 IMAPS CII, Denver CO Aperture/Collector Segment

    15. 15 April 9, 2003 IMAPS CII, Denver CO Drift Tube Segment

    16. 16 April 9, 2003 IMAPS CII, Denver CO Tyndall Gate Segment

    17. 17 April 9, 2003 IMAPS CII, Denver CO Ionization Tube Segment

    18. 18 April 9, 2003 IMAPS CII, Denver CO Segmented Manufacturing Process

    19. 19 April 9, 2003 IMAPS CII, Denver CO Development Direction Initial Design Prototype ~800 layers Unproven Process Large Material Investment per Device Test Article Prototype 66 layer construction Prove Overall Process Smaller Size 28mm OD 4mm ID Reduced Material Investment (11 base sheets)

    20. 20 April 9, 2003 IMAPS CII, Denver CO Test Article Prototype - Fabrication

    21. 21 April 9, 2003 IMAPS CII, Denver CO Test Article Prototype - Completed

    22. 22 April 9, 2003 IMAPS CII, Denver CO Preliminary Results Conductivity achieved to: Co-Fired Screen Gates First Drift Tube Ring Separation caused open circuit in Drift Tube Dual routing steps successful PSA low-pressure bonding partially successful 66 layers fired with one separation

    23. 23 April 9, 2003 IMAPS CII, Denver CO Future Goals IMS Prototype Complete 2nd Test Article Prototype Test IMS at WSU Analytical Chemistry Laboratory (target 10 ppm toluene) Optimize IMS Design Complete Thesis Optimize Fabrication Process Add New Fabrication Techniques Pursue additional LTCC devices and applications using the C-MEMS process.

    24. 24 April 9, 2003 IMAPS CII, Denver CO BSU C-MEMS Projects Current Work Capacitive Pressure Sensor Electro-Chemical Cell Ion Mobility Spectrometer (IMS) Future Work Power Scavengers Meso-Scale Nozzles (~5N Thrust)

    25. 25 April 9, 2003 IMAPS CII, Denver CO Acknowledgements IMAPS – Sidney J. Stein Educational Foundation Grant (2002-2003) Environmental Protection Agency (EPA) DuPont Material Donations Agilent Equipment Donations

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