1 / 6

The NanoGate: A device for nanometer control of the separation between two plates

The NanoGate is a device that accurately controls the flow of small amounts of fluid by deflecting a polished cantilevered plate. It can be fabricated on a macro-, meso-, or micro-scale and has potential applications in fuel injection, microfluidics, variable capacitors, and physics experiments.

addied
Download Presentation

The NanoGate: A device for nanometer control of the separation between two plates

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. The NanoGate: A device for nanometer control of the separation between two plates Prof. Alex Slocum Prof. Jeff Lang Hong Ma Alex Sprunt James White Xue’en Yang Massachusetts Institute of Technology http://pergatory.mit.edu slocum@mit.edu June 28, 2002

  2. Possible fuel injector application? Nanogate • The Nanogate is a device that precisely meters the flow of tiny amounts of fluid. • Precise control of the flow restriction is accomplished by deflecting a highly polished cantilevered plate. • The opening is adjustable on a sub-nanometer scale, limited by the roughness of the polished plates. • The Nanogate can be fabricated on a macro-, meso- or micro- (MEMs) scale. • This research grew out of understanding of flow metering garnered from years of hydrostatic bearing research • This research was initially funded by an NSF award, number 9900792 • The Center for Bits and Atoms is funding the continued development of the Nanogate technology as it evolves into the FractureGate

  3. Surface Creation J. Connally and S. Brown, “Micromechanical Fatigue Testing,” Experimental Mechanics, Vol 33, No. 2 (June 1993) • Fracture • Must be done slowly • Surfaces will be matched (no plasticity) • Even “mirror” regions not atomically smooth • Stress Corrosion Cracking • 0.12 nm surface roughness independent of crystal orientation • K. Minoshima, S. Inoue, T. Terada, and K. Komai, “Influence of Specimen Size and Sub-Micron Notch on the Fracture Behavior of Single Crystal Silicon Microelements and Nanoscopic AFM Damage Evaluation,” Mat. Res. Soc. Symp. Vol. 546, pp. 15-20, 1999. Polished Stress Cracked

  4. Concept • Etch manifold wafer • Bond wafers • DRIE through • Break w/external actuator • =FractureGate In silicon, surfaces would be matable

  5. Bench Level Experiment FlexurePivot • Insight into variables that affect stress corrosion cracking, i.e. stress, humidity, temperature • AFM study of the surfaces Specimen Beam Pull-inAssist Zipper ZipperElectrode

  6. Applications • Microfluidics • Variable Capacitor • Physics in Gap Experiments • Alternate Universes!?

More Related