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MEMS Devices ? Design, Packaging and Production. Slide 2. Outline of talk. Mainly a presentation of Norwegian MEMS activitiesMain challenges of the Microsystem/MEMS industryExamples of MEMS devices Future and Conclusions: A strong market pull will stimulate the needed maturing of the Microsystem/
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1. MEMS Devices – Design, Packaging and Production Slide 1 MEMS Devices – Examples of Design, Packaging and Production Per Ohlckers SINTEF Microsystems and University of Oslo