300 likes | 574 Views
Application examples. Eötvös University Budapest and Technoorg Linda co-operation. SC-1000 SEMPrep. FEI Quanta 3D dual beam SEM. SURFACE POLISHING – Cu , SEM. SEM ETD image. EBSD IPF image. Mechanical polishing : 1µm ( without SEMPrep treatment ). SURFACE POLISHING – Cu , IPF.
E N D
Applicationexamples Eötvös University Budapest and Technoorg Linda co-operation SC-1000 SEMPrep FEI Quanta 3D dualbeam SEM
SURFACE POLISHING – Cu, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)
SURFACE POLISHING – Cu, IPF Kikuchipatterns EBSD IPF image Ar ion polishing: 10 kV 7° pretilt, 15 min, withrotation
SURFACE POLISHING – Cu, IQ Ar ion polishing: 10 kV 7° pretilt, 15 min., withrotation IQ: 2090
SEMPrepcut – Cu, SEM ETD images Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 120 min millingrate: 2.4 µm/min
SEMPrepcut – Cu, IPF Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 2.4 µm/min IQ=3000
SEMPrepcut – Cu, IPF Kikuchipatterns EBSD IQ=3000
SEMPrepcut – Cu, IQ Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 2.4 µm/min IQ=3000
SURFACE POLISHING – Al, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)
SURFACE POLISHING – Al, IPF EBSD IPF image SEM ETD image Ar ion polishing: 10 kV 10° pretilt, 10 min, withrotation
SURFACE POLISHING – Al, IQ Ar ion polishing: 10 kV 10° pretilt, 10 min., withrotation IQ: 2640
SURFACE POLISHING – Al-Siwire, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)
SURFACE POLISHING – Al-Siwire, IQ and IPF IQ=1054 EBSD IPF image Ar ion polishing: 10 kV 7° pretilt, 45 min, withrotation
SEMPrepcut – Al-Siwire, SEM images Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 120 min millingrate: 1.8 µm/min
SEMPrepcut – Al-Siwire, IPF Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 1.8 µm/min IQ=838
SEMPrepcut– Al-Siwire, IQ Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 1.8 µm/min IQ=838
SURFACE POLISHING – Ni, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)
SURFACE POLISHING – Ni, IPF SEM ETD image EBSD IPF image Ar ion polishing: 10 kV 12° pretilt, 10 min, withrotation
SURFACE POLISHING – Ni, IQ Ar ion polishing: 10 kV 12° pretilt, 10 min., withrotation IQ: 2741
SEMPrepcut– Ni, IPF Arion beamenergy: 10 keV sample tilt 30o, oscillation: ± 30 deg. millingtime: 120 min, millingrate: 1.7 µm/min IQ=1863
SEMPrepcut– Ni, IPF Kikuchipatterns EBSD IPF image
SEMPrepcut– Ni, IQ Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 1.7 µm/min IQ=1863
SURFACE POLISHING – Fe, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)
SURFACE POLISHING – Fe, IPF EBSD IPF image SEM ETD image Ar ion polishing: 10 kV 7° pretilt, 26 min, withrotation
SURFACE POLISHING – Fe, IQ Ar ion polishing: 10 kV 7° pretilt, 26 min., withrotation IQ: 1574
SEMPrepcut – Si, SEM ETD image Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 60 min millingrate: 1.9 µm/min
SEMPrepcut – non-conductivesamples: pyrite SEM ETD images Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 60 min millingrate: 1.6 µm/min
SEMPrepcut – non-conductivesample: limestone SEM ETD images, lowvacuummode Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 120 min millingrate: 1.6 µm/min
SEMPrepcut– limestone, IPF and IQ Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 1.6 µm/min EBSD imagingatlowvacuum, usingnon-conductivesample
SURFACE POLISHING – Cu, Gentle Mill vs. SEMPrep Cusample, surfacepolishingcomparison