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Environmental, Safety and Health Thrust

Environmental, Safety and Health Thrust. Jun-ichi Aoyama JEITA (Sony) Abel Hsu TSIA (UMC) Jim Jewett SIA (Intel). AGENDA. Introduction/Background 2000 Update Contents Technology & ESH Timing Red/Yellow Coding Cross-TWG Activity 2001 Revision: Issues & Needs.

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Environmental, Safety and Health Thrust

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  1. Environmental, Safety and Health Thrust Jun-ichi Aoyama JEITA (Sony) Abel Hsu TSIA (UMC) Jim Jewett SIA (Intel)

  2. AGENDA Introduction/Background 2000 Update Contents Technology & ESH Timing Red/Yellow Coding Cross-TWG Activity 2001 Revision: Issues & Needs Work in Progress - Not for Publication

  3. ESH THRUST COVERAGE • Assembly & Packaging • Factory Integration • Front-End Process • Interconnect • Lithography

  4. CROSS THRUST SCREEN • Chemicals, Materials and Equipment Management • Climate Change Mitigation • Workplace Protection • Resource Conservation • ESH Design and Measurement Methods

  5. ESH THRUST OBJECTIVES • MAKE FACTORIES WORLD CLASS “SAFE PLACE TO WORK” • MANAGE MATERIALS W/PROACTIVE ESH PRACTICES • DISPOSAL • ABATEMENT • USE MINIMIZATION • CONSERVATION OF WATER and ENERGY RESOURCES

  6. 2000 Update Contents Node and Gate Shrink Accelerated,but New Chemical Introductions Slowed Other Technology Driven Challenges Were Not Changed ESH Driven Challenges Remain Unchanged 180nm and pre-130nm Technology Requirement Solutions Re-coded Work in Progress - Not for Publication

  7. CROSS-TWG ACTIVITY FI ITWG Infrastructure Issue Identified in July 2000 FI Update Addressed In 300mm Factory Conversion Work in Progress - Not for Publication

  8. 2001 REVISIONPLANS

  9. PERSPECTIVE CHANGE TO ESH SCREEN • RATE OF GROWTH IN SEMICONDUCTOR INDUSTRY RESULTS IN PARALLEL GROWTH IN POLLUTION • MANY NEW AND “EXOTIC” CHEMICALS REQUIRED FOR FUTURE TECHNOLOGIES • MATERIALS HAVING SERIOUS EHS IMPLICATIONS SHOULD BE RESTRICTED OR BANNED

  10. CONSEQUENCES ARE: USE OF MATERIALS MUST CONSIDER: • COMPREHENSIVE CHARACTERIZATION OF EHS PROPERTIES • HAZARD TO EMPLOYEES APPROACHES ZERO • RELEASE TO ENVIRONMENT APPROACHES ZERO • CONTENT IN PRODUCTS RESTRICTED

  11. REMAINING IN 2001. . . Improve Resource Conservation (Water and Energy) Objectives Resolve Conflicts Between Technology Driven and ESH Driven Technology Requirements Increase Cross-Thrust Interactions Work in Progress - Not for Publication

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