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He/O-ICR in HT-7’2007

He/O-ICR in HT-7’2007. J.S Hu, J.G Li 2007.5.31. 实验目的. GAP 中再沉积层清除 氧化后等离子体恢复 优化和加强清洗 硼化对氧化后等离子体恢复的影响. 实验进程. 4:1He/O 2 -ICR, 70’ Pumping with 3 cryo-pump, 15’ D2-ICR, 40’ Pumping with 3 cryo-pump, 15’ He-ICR,50’ Pumping with 3 cryo-pump, 15’ B-ICR+He-ICR, 70’+90’

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He/O-ICR in HT-7’2007

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  1. He/O-ICR in HT-7’2007 J.S Hu, J.G Li 2007.5.31

  2. 实验目的 • GAP中再沉积层清除 • 氧化后等离子体恢复 • 优化和加强清洗 • 硼化对氧化后等离子体恢复的影响

  3. 实验进程 • 4:1He/O2-ICR, 70’ • Pumping with 3 cryo-pump, 15’ • D2-ICR, 40’ • Pumping with 3 cryo-pump, 15’ • He-ICR,50’ • Pumping with 3 cryo-pump, 15’ • B-ICR+He-ICR, 70’+90’ • Pumping with 3 cryo-pump, 15’ • Plasma discharge • Temp.Limiter ~110OC • Temp.Liner ~200OC • 0.3s on/ 1.5s off

  4. Vacuum

  5. After experiment

  6. He/O-ICR-1

  7. He/O-ICR 2

  8. He-ICR-1

  9. He-ICR 2

  10. B-ICR

  11. He-ICR 3

  12. Plasma discharge B&A

  13. Plasma recovery95816-95830-95861-95866

  14. Comparison with OH disruptive PD before oxidation

  15. Comparison with OH after 3nd Boronization92131-9230298515-98566

  16. Summary • Successful experiment! Thank you for attentionThank ICR, Vacuum Group and Dr.Gong for their help.

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