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Application of hydrogen bubbles in silikon for Smart – Cut process

Application of hydrogen bubbles in silikon for Smart – Cut process. Karolina Milenko Faculty of Physics Warsaw University of Technology Supervisor s : V.F.Reutow A.S.Sohatsky Flerov Laboratory of Nuclear Reactions. Making silicon blisters and flakes. Si. Si. Si. Blisters. Flakes.

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Application of hydrogen bubbles in silikon for Smart – Cut process

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  1. Application of hydrogen bubbles in silikon for Smart – Cut process Karolina Milenko Faculty of Physics Warsaw University of Technology Supervisors:V.F.Reutow A.S.Sohatsky Flerov Laboratory of Nuclear Reactions

  2. Making silicon blisters and flakes Si Si Si

  3. Blisters

  4. Flakes

  5. Blisters

  6. Flakes

  7. Smart- Cut Wafer B Wafer A Wafer A Wafer B Wafer B Wafer A

  8. Swelling Si Si Si

  9. Swelling Si

  10. Swelling Si

  11. h d Swelling Si

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