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P Side. Testing points. Metal 1. Metal 2. Deep n+. Deep n+. Deep n+. Deep N+. Bias Pad. Poly. AC pads. Bias pad. Bias pad. Poly contact opening on DC pad. Via It makes connection between metal 1 and metal2. DC pads. Contact opening. P+. AC pads. AC pads.
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Testing points Metal 1 Metal 2 Deep n+ Deep n+ Deep n+ Deep N+ Bias Pad Poly AC pads Bias pad Bias pad Poly contact opening on DC pad Via It makes connection between metal 1 and metal2 DC pads Contact opening P+ AC pads AC pads Capacitor layer (sio2 ) Pside
P+ Strip width : 50 Strip pitch : 75 No. of strips : 1024 Length of strips : 25600
Poly contact opening on DC pad
Metal 1 Deep n+ Pside
Via It makes connection between metal 1 and metal2
Metal 2 Deep n+
Testing points Deep N+ Bias Pad AC pads Bias pad Bias pad DC pads AC pads AC pads
Protective Metal Bias line DC pad AC pad N+ Capacitor mask Poly opening Poly P+ Mask Contact opening Bias pad Substate N Side
Protective Bias line DC pad AC pad Bias pad Substate