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Design of Small Chemical Vapor Deposition System for Materials Research Application

March 4 th , 2010. Design of Small Chemical Vapor Deposition System for Materials Research Application . EML 4905 Senior Design Project Advisor: Dr. K. H. Wu March 24, 2010. Shamil Baldeosingh Dasney Joseph Walter McKinley. Overview. Background Problem Statement

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Design of Small Chemical Vapor Deposition System for Materials Research Application

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  1. March 4th , 2010 Design of Small Chemical Vapor Deposition System for Materials Research Application EML 4905 Senior Design Project Advisor: Dr. K. H. Wu March 24, 2010 Shamil Baldeosingh Dasney Joseph Walter McKinley

  2. Overview • Background • Problem Statement • Design Specifications • Conceptual Designs • Project Management • Future Plans

  3. Chemical Vapor Deposition for Carbon Nanotube (CNT) Synthesis • Chemical Vapor Deposition ( CVD ) • Widely used for engineering applications • Scalable to industrial production • 20-100 % yield • Controllable parameters to determine properties

  4. What Are Carbon Nanotubes? • Large Research Interest • Properties • Mechanical • Electrical • Thermal • Novel Applications • Variations • Dimensions and Geometry • Quality and Yield Zhao et al., Physical Review Letters,

  5. Problem Statement • CNT synthesis for current CVD system • 3 hours for sample size of 1 – 5 grams • Furnace heating of entire reaction chamber • Such a large sample size is not necessary for research • CNT synthesis for proposed CVD system • 0.5 hours for sample size of less than 1 gram • Localized heating of gases and substrate • Appropriate for research applications

  6. System Constraints • Preheated Gas Temperature • At least 400 ̊c • Substrate Temperature • 600-1000 ̊c

  7. Design Specifications • Packaging • Accessibility • Substrate should be easily loaded • Maintenance of system • Gas flow • Reynolds number << 2100 : Laminar Flow • Peclet number << 1 • Knudsen number > 1

  8. Conceptual Design AUniform Diameter Tube

  9. Conceptual Design B Variable Diameter Tube

  10. Conceptual Design C Modular Cube

  11. Comparison of Conceptual Designs Excellent – 1 Very Good -2 Good – 3 Fair – 4 Poor - 5

  12. Heating Considerations • Substrate Material • Wafer • Powder • Resistive Heating Element • Material • Configurations • Life span • Thermal Strength • Thermal Shock • Thermal Expansion • Deflection • Power Input • AC vs. DC • H-Current/ L-Voltage • L-Voltage/H-Current

  13. Division of Responsibility • Heat Generation • Dasney Joseph • Instrumentation and Fluid Mechanics • ShamilBaldeosingh • Conceptual Designs and Prototype • Walter McKinley

  14. Gantt Chart -Spring 2010

  15. Gantt Chart - Fall 2010

  16. Human Cost

  17. Future Work • Design Modeling • SolidWorks • Simulation • ANSYS CFX • Fluid Mechanics • Heat Transfer from Resistive Heating Elements • Instrumentation and Control • LabVIEW • Thermocouple • Infrared Temperature Sensor • Mass Flow Controller • Prototype Testing • Scanning Electron Microscope ( SEM ) • Verify growth of CNT’s

  18. Acknowledgments • Dr. Wu ( Florida International University ) • AmitDatye ( Oak Ridge National Laboratory ) • John Hart ( Massachusetts Institute of Technology )

  19. Questions & Comments

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