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German - Chinese International Research Training Group (IRTG 1215)

German - Chinese International Research Training Group (IRTG 1215) Materials and Concepts for Advanced Interconnects. Opening German Chinese Year of Science and Education March 31th, 2009. Prof. Dr. Stefan E. Schulz Chemnitz University of Technology / Fraunhofer ENAS Chemnitz.

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German - Chinese International Research Training Group (IRTG 1215)

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  1. German - Chinese • International Research • Training Group (IRTG 1215) • Materials and Concepts for Advanced Interconnects Opening German Chinese Year of Science and Education March 31th, 2009 Prof. Dr. Stefan E. SchulzChemnitz University of Technology / Fraunhofer ENAS Chemnitz

  2. Chemnitz University of Technology Fraunhofer ENAS, Chemnitz Chemnitz

  3. IRTG coordinator Prof. Dr. Dr. Prof. h.c. mult. Thomas Gessner Professor for Microtechnology at Chemnitz Technical University Director of Center for Microtechnology at TUC Head of Fraunhofer Research Institution Electronic Nano Systems (ENAS) Advisory Professor at Fudan University 1999 Advisory Professor at University Chongqing 1999 Guest Professor of Chinese Academy of Science

  4. Outline • Topic • Partners • Project Organization • Background of Cooperation • Structure of IRTG • Highlights • Summer Schools • Mobility Periode • Administrative Organisation • Difficulties in cooperative work • Conclusions and Results More Information: http://www.zfm.tu-chemnitz.de/irtg/

  5. Microchips … Transistors on a chip need to be wired to each other. … are all around! Topic

  6. Multi-disciplinary program: • Electrical and microelectronics engineering • Materials science • Physics • Chemistry • Basic and applied research on: • Microelectronics back-end of line (metallization, interconnects) • Microelectronics packaging • Selected front-end of line topics Topic  One of the few Engineering Graduate Schools It is the aim of the IRTG program to highlight links between: • Fundamental materials properties, • Their characteristics on the nanoscale, • Technological aspects of materials, • And their application to next-generation micro- and nanoelectronic devices.

  7. Partners • Chemnitz University of Technology • Institute of Physics • Institute of Chemistry • Center for Microtechnologies (ZfM) • Fraunhofer Research Institution for Electronic Nanosystems (ENAS) • Fraunhofer Institute for Reliability and Microintegration (IZM) • Berlin Technical University • Fudan University, Shanghai • Shanghai Jiao Tong University

  8. Coordinators Vice Coordinators GermanyChina Prof. Dr. Thomas GESSNERChemnitz University of Technology Center for Microtechnologies Prof. Dr. Ran LIUFudan UniversitySchool of Microelectronics Prof. Dr. Dietrich R.T. ZAHNChemnitz University of Technology Institute of PhysicsChair Semiconductor Physics Prof. Dr. Di CHENShanghai Jiao Tong University Research Institute for Micro/Nano Science & Technology Partners Project Organization • 4.5 years (April 2006 to September 2010) • Jointly funded by German Research Foundation (DFG) and the Ministry of Education of the People‘s Republic of China (MoE) • 14 PhD positions and 1 Postdoc position at the German partner institutions • Up to 20 PhD positions at the Chinese partner institutions

  9. Partners Cooperation Background A lot of Chinese Professors were visiting scientist or got the PhD in Germany Prof. Liu Ran (PhD at MPI Stuttgart) Prof. Chen Di (PhD at Uni. Hamburg) Prof. Yan Xue-Jian (PhD at TUC) Prof. Wan Yong-Zhong (PostDoc at Uni. Ulm) Prof. Ding Shi-Jin (Research Fellow of A.v. Humboldt Foundation at Uni Kiel) Prof. Zhang Wei (Research Fellow of A.v. Humboldt Foundation at TUC/ZfM Ass. Prof. Zhou Jia (visiting Scientist at TUC/ZfM) Prof. Ruan Gang (Advisory Professor at TUC; Senior Consultant for Science and Technology at Fraunhofer ENAS) Exchange from German Side • Prof. Thomas Otto (visiting scientist at Fudan University in 1987-1988 and 1995 and Advisory Professor of University Chongqing 2003) • Prof. Thomas Gessner (Advisory Professor at Fudan University 1999, Advisory Professor at University Chongqing 1999, Guest Professor of Chinese Academy of Science)

  10. Partners Cooperation Background • Cooperation between Chemnitz University (ZfM) and Chinese institutions, • especially Fudan University, since 1997 • - Joint research projects in micro-electronics, e.g. process modeling and equipment simulation • - Student exchange • - Visiting scientists • Long-term collaboration between Fudan and Shanghai Jiao Tong University • Shanghai Branch Office of the Fraunhofer IZM/ENAS since 2002 • Cooperation among German partners within several projects, e.g. SFB 379 • Strong links between the ZfM and Fraunhofer ENAS Building of the branch office of Fraunhofer ENAS in Shanghai

  11. Partners Cooperation Background Workshop on Materials for Advanced Interconnects at Fudan University, 13 and 14 July 2004 and preparation of IRTG project Yongzhong Wan, Di Chen, Dietrich Zahn, Heinrich Lang, Min Shi, Wenbin Cai Oswin Ehrmann, Frank Richter, Michael Hietschold, Xuejian Yan, Guoping Ru Xin-Ping Qu, Thomas Otto, Reinhard Streiter, Gang Ruan, Thomas Gessner, Dieter Happel, Ran Liu, Zhou Jia

  12. Research Program Study Program Student Exchange Structure of IRTG • Lectures • Specially tailored to the IRTG research topics • Usually held as block courses • Continued monitoring of the students‘ progress by final exams • Quality assessment • Summer Schools • 1 to 2 weeks every year • In Germany or China • Scientific and organizational board meetings to review the IRTG activities • Mobility Period • German students: 3 months at one of the partner institutions in Shanghai • Chinese students: 3 to 4 months in Chemnitz or Berlin • Laboratory courses • Complement to the lectures • Multidisciplinary education in diverse fields • Colloquia to monitor the participants‘ progress • Visiting Scientists • Scientists from the IRTG partner institutions • Other renowned scientists from the international community • Seminars of the research training group • Presentations of the latest achievements by the PhD students • Talks by invited speakers

  13. Structure of IRTG PhD graduation after ~ 3 years 3rd year Mobility Period: 3 months at a foreign partner institution R E S E A R C H Summer Schools 1 to 2 weeks, each year Germany or China 1st and 2nd year Compulsory lectures, supplementary lab courses, seminars

  14. Scientific Program Cultural Program • presentation of progress of PhD work • Invited Talks of international scientists • combined with other events (Novellus workshop or MAM 2008) • Lab tours • sightseeing of the cities (Chemnitz, Shanghai, Berlin, Dresden) • Visit to a Museum (Industrial Museum Chemnitz, Shanghai Museum) • Visit of Historical Places (Rochsburg, Zhujiajiao) Highlights in IRTG Summer Schools Summer Schools alternately organized by German and Chinese Partners 1. Automn School In Chemnitz (November 18-25 2006) 2. Summer School in Shanghai at Fudan University (May 30-June 4 2007) 3. Spring School in Dresden (March 2 – 8 2008) 4. Summer School at Shanghai Jiao Tong University (May 12 – 17 2009)

  15. Highlights in IRTG Summer Schools 2. Summer School at Fudan University Shanghai • combined with the 4th International Copper Interconnect Technology Symposium • Benefit:International Speakers • Open for all students of the Microelectronic School of Fudan University • financial support Invited presentations by: Dr. ZOU Shi-Chang, Chinese Academy of Science and Shanghai IC Industry Assoc. – Keynote Speaker Prof. Dr. Steven GEORGE, Univ. of Colorado, Boulder, CO (USA) Prof. Dr. David RUZIC, Univ. of Illinois at Urbana-Champaign (USA) Prof. Dr. Thomas GESSNER, Chemnitz Univ. of Technology (Germany) Dr. Jon REID, Novellus Systems (USA) Dr. T.S. KUAN, State Univ. of New York - SUNY, Albany (USA) Prof. Dr. Duane BONING, Massachusetts Institute of Technology (USA) 6 PhD student presentations from IRTG

  16. Highlights in IRTG Summer Schools 2. Summer School at Fudan University Shanghai Impressions Sightseeing in the traditional village Zhujiajiao On the Novellus Workshop Night boat trip on the Huang Pu River

  17. Highlights in IRTG Summer Schools 3. Spring School in Dresden • Combined with the Conference „Materials for Advanced Metallization“ MAM 2008 • 12 Contributions to the MAM 2009 from IRTG • Contacts with International Scientists and local Industry (AMD, Infineon, Quimonda) Poster Session at MAM 2008 Lab Tour in the cleanrooms of TU Chemnitz

  18. Highlights in IRTG Mobility Periode To Germany To China 9 completed Exchanges 3 in preparation for this year 3 completed Exchanges 3 students just arrived resulted in 3 joint publications up to now • Difficulties: • Highly specialized PhD topics with requirement of technical standard • Different level in clean room technique and microelectronic equipment • Administrative barriers for application to China • restricted application  only ones per year • planning more than 1 year before (cancel of exchange – causes: health, time, family) • exchange periode is mainly planned for 3d year – 2nd application no more possible

  19. Administrative Organization Organisation of Lectures Lab courses Seminars Language Courses Contact person for the PhD student for Professors to China PostDoc +2 administration employees Reports Proposals Public Relation Administration Visa Application Accomodation ….. Organisation of Summer Schools of Exchange Program

  20. Administrative Organization • Fraunhofer ENAS office in Shanghai • Dr. Shi Min  speaks German and English • help for organizing and administrative problems • neutral place for meetings • Frequent visits of Prof. Gessner and Prof. Otto • every time, if they are in Asia, they try to go also to Shanghai and visit partners (3-4 times a year)

  21. Difficulties in cooperative work • From German point of view: • financial support in China • no appropriate funds available in China for this project • financial support goes to University in general • departments/ school have to apply again at the University administration to receive the money • no additional support for organizing of Summer Schools in China • restricted application deadlines for exchange for both sides • only ones per year • flights to Germany must be coupled with mobility period • no support for flight only for Summer Schools in Germany • in general one flight in 3 years

  22. Difficulties in cooperative work • From German point of view (cont‘d): • limited motivation for Chinese partner to participate in IRTG • motivation only from scientific and intercultural point of view • no additional PhD students or financial support •  input for new ideas/changements almost only from German side

  23. Conclusion and Results • at the beginning high additional effort to create structures for lectures, lab courses, language courses, application forms for exchange … • Now it works well  rules for organization, exchange program … • need for more flexibility Results in Germany • 2 thesis have been submitted (in January and March) • 5 further thesis will be submitted up to the end of this year • growing number of publications: 2006  3; 2007  19, 2008  30 • high percentage of women: 8 / 15 (14 PhD + 1 PostDoc)

  24. Acknowledgement • We gratefully acknowledge both general and financial support of: • The Ministry of Education of the P.R. of China (MOE) • The German Research Foundation (DFG) • All others who supported our common Chinese-German activities, e.g.: • Alexander v. Humboldt Foundation • Federal Ministry for Education and Research (BMBF)

  25. Thank you for your attention ! Pudong 1990 AMD Fab 36 and 38, Dresden (a GLOBALFOUNDRIES company) Pudong 2000

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