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Demonstration of the Stroboscopic Algorithm for Non-Contact Characterization of Dynamic MEMS

Demonstration of the Stroboscopic Algorithm for Non-Contact Characterization of Dynamic MEMS. Jason Choi Professor Andrei Shkel Adam Schofield, Alex Trusov, Ozan Anac. Outline. UCI Micro Systems Laboratory Introduction to Gyroscopes Introduction to Resonators

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Demonstration of the Stroboscopic Algorithm for Non-Contact Characterization of Dynamic MEMS

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  1. Demonstration of the Stroboscopic Algorithm for Non-Contact Characterization of Dynamic MEMS Jason Choi Professor Andrei Shkel Adam Schofield, Alex Trusov, Ozan Anac

  2. Outline • UCI Micro Systems Laboratory • Introduction to Gyroscopes • Introduction to Resonators • Basic building blocks of tuning fork gyroscopes • Gyroscope Characterization • Our Approach to Characterizing Devices • Microvision with a Stroboscopic Algorithm • Our System • Results

  3. UCI Micro Systems Laboratory • Development of MEMS Inertial Sensors • Gyroscopes • Tuning Fork Gyroscope • Nuclear Magnetic Resonance Gyroscope • Design • Modeling • Fabrication • Characterization

  4. Gyroscopes • What is a gryoscope? • A device that can measure angular motion or displacement • Applications • Aerospace • Inertial guidance systems • Automotive • Angular rate sensor • Entertainment • Pointing devices, Gaming controller • Medical • Vestibular prosthesis http://www.army.mil http://www.aa1car.com http://mems.eng.uci.edu/

  5. Tuning Fork Gyroscope Principle • Coriolis Effect Drive Oscillation Coriolis Acceleration http://www.li-bachman.net

  6. Resonator: A Basic Building Block 3 mm 3 mm http://mems.eng.uci.edu/ Design and Fabricated by Alex Trusov

  7. SEM Picture of Resonator Image taken by Alex Trusov

  8. Actuating a Resonator 3 mm Thickness of Each Comb = 6 micons AC Voltage 3 mm Drive Oscillation Ground Design and Fabricated by Alex Trusov

  9. Video of device moving Drive Oscillation

  10. MEMS Characterization • Frequency Response • Resonant Frequencies • Maximum Amplitudes • Difficulty • Small Micro-Scale Devices (mm) • Vibration at High Frequency (kHz) • Thousands of vibrations per second • Vibration Amplitudes are small (few microns)

  11. Conventional Characterization • Capacitive Sensing • Change in the gap between two electrodes changes the capacitance. • Two electrical terminals are used other than the driving terminals. • Drawbacks • Changes in capacitance are small. • Indirect method to measure deflection • Calculation of physical deflection is done by theoretical calculations.

  12. Microvision with Strob. Technique • Proven Characterization Method • Jasmina Casals • Main Idea • Video record the vibration of device • Extract vibration amplitudes from the extracted frames of the video • Advantages • Optical, Non-Contact Characterization Method • Minimal Control Electronics

  13. Stroboscopic Technique Picture by Alex Trusov • Standard Image • Limited FPS (frames per second) of video camera • Stroboscopic Technique • Solution: Stroboscopic Technique • N x (Frequency of Strobe) = Frequency of Vibration • N = Positive Integer • Example: If Frequency of Vibration = 30KHz • One solution: Frequency of Strobe = 30Hz, N = 1000

  14. Stroboscopic Technique

  15. Blurred Image (device at 2.45KHz)

  16. Stopped Video (device at 2.45KHz)

  17. Slowed Down Video (device at 2.45KHz)

  18. MicrovisionHardware Block Diagram CCD Camera Strobe Light Microscope • Computer • Image Pro • - Capture Image • - Image Processing • MATLAB • - Data Processing • - Sinusoidal Fit AC/DC Source MEMS Device Trigger Signal

  19. Microvision Setup CCD Camera Microscope Trigger Source Stroboscope MEMS Device Computer AC/DC Source

  20. MEMS Device Close Up MEMS Device

  21. Image Processing: Image Pro

  22. Image Processing: Image Pro

  23. Edge Detection

  24. ImagePro Program

  25. Results from year 2002 Yellow: non-moving part of device Pink: moving part of device

  26. Results: Previous Camera

  27. Results: Upgraded Camera

  28. Results: Upgraded Camera • One Example • Freq. of Motion • 2460Hz • Freq. of Strobe • 55.909Hz • N = 44 • Amp. of Motion • 5.77 ± 0.05 micron

  29. Conclusion • Successful Final Product • Measure amplitudes of vibration • Image Pro Macro Programming • MATLAB Data Processing • Amplitude Precision • (standard deviation of nonmoving object) • ± 0.05 microns • Successful Upgrade in Camera • Better Images • Optional LabVIEW VI to automatically actuate device and set strobe frequency

  30. Future Work • Verify Accuracy of Amplitudes with Electrical Capacitance Measurements • Characterize Devices • Continue Project to Characterize 3-D Movement

  31. Acknowledgements • Said Shokair • Professor Andrei Shkel • Jasmina Casals • Adam Schofield • Alex Trusov • Ozan Anac • IM-SURE Fellows

  32. Questions ?

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