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Metrology of Prototype Nanolaminate Deformable Mirrors

Metrology of Prototype Nanolaminate Deformable Mirrors. John Ruiz San Antonio College Lawrence Livermore National Laboratories Principle Investigator: Scot Olivier Research Supervisor: Kevin Baker Research Advisor: Stacie Hvisc. Overview. Introduction to current and new deformable mirrors.

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Metrology of Prototype Nanolaminate Deformable Mirrors

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  1. Metrology of Prototype Nanolaminate Deformable Mirrors John Ruiz San Antonio College Lawrence Livermore National Laboratories Principle Investigator: Scot Olivier Research Supervisor: Kevin Baker Research Advisor: Stacie Hvisc

  2. Overview • Introduction to current and new deformable mirrors. • Methods used to measure prototype. • Results from measuring the prototype. • Discussion of the results. • Conclusion of my presentation.

  3. Introduction • Introduction to current and new deformable mirrors (DM). • Current DM • New DM • Nanolaminate • Integrated Actuation • Mirror Displacement From presentation “Integrated Active Nanolaminate Optics” at LLNL

  4. Nanolaminate Mirror • Produced by sputtering alternating layers of two metals onto a pre-formed mandrel. • Nanolaminate mirrors areal density can be as low as 1kg/m. • Nanolaminate mirrors can be fabricated in less than a week and can be ~ 1 m thick. 2 From presentation “Integrated Active Nanolaminate Optics” at LLNL

  5. Integrated Actuation Mirror Layer Spring Layer Base & Electrodes Private communication from Alexandros Papavasiliou papavasiliou1@llnl.gov

  6. Mirror Displacement • Ridges are electroplated on base layer. • Spring layer is bonded to ridges on base layer. • Posts are electroplated on the back side of the mirror. • Posts on mirror are bonded to spring layer. Electroplated posts and ridges From presentation “Integrated Active Nanolaminate Optics” at LLNL

  7. Methods • Methods used to measure the prototypes. • UBM Laser Profilometer • Reference Standard

  8. Metrology

  9. Results • Results from measuring the prototype. • Continuous Spring Layer Data • Etched Spring Layer Data

  10. Continuous Spring Layer Data + - Scanning Direction

  11. Continuous Spring Layer Data 9 7 6 4 3 1

  12. Etched Spring Layer Data + - Scanning Direction

  13. Discussion • Discussion of the results • Calibrating the Absolute Displacement

  14. Calibrating • Calibrated measurements of NL reference ~7.16 m. • UBM measurements of NL reference ~ 6.25 m. • 13% difference. Continuous Spring Layer Etched Spring Layer Average Displacement ~ 2.77 m Average Displacement ~ 2.73 m

  15. Conclusion • Continuous Spring Layer DM • more consistent actuation • Gaussian influence function • ~ 2.73 μm average deflection • Etched Spring Layer DM • less consistent actuation • Super Gaussian influence function • ~ 2.77 μm average deflection • 2nd and 3rd generation prototypes • Scaling to meter size DM • Lightweight space telescopes From presentation “Integrated Active Nanolaminate Optics” at LLNL

  16. Acknowledgements & Thanks • Rosa Maria Gonzalez • MAES • Tony Leiva • HACU • Malika Bell • CfAO • Scot Olivier • Kevin Baker • Stacie Hvisc • Jay & Shannon Ayers • Rick Levesque • LLNL • This project is supported by the National Science Foundation Science and Technology Center for Adaptive Optics, managed by the University of California at Santa Cruz under cooperative agreement No. AST - 9876783

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