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Microhotplate Characterization and SoC Development

Joshua Buck SURF 2006. 2. Talk Outline. MEMS and SoC DescriptionMEMS CMOS Gas sensorMicrohotplate CharacterizationTCRThermal Time ConstantThermal EfficiencyPower automationQ

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Microhotplate Characterization and SoC Development

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    1. Joshua Buck SURF 2006 1 Microhotplate Characterization and SoC Development Joshua Buck Advisors: Dr. M. Yaqub Afridi and Ankush Varma NIST, EEEL, SED, SoC Metrology SURF 2006

    2. Joshua Buck SURF 2006 2 Talk Outline MEMS and SoC Description MEMS CMOS Gas sensor Microhotplate Characterization TCR Thermal Time Constant Thermal Efficiency Power automation Q & A

    3. Joshua Buck SURF 2006 3 Why MEMS and SoC MEMS: Micro-Electro-Mechanical Systems Microfabrication processes enable creation of micro scale devices ES-SoC: Embedded Sensor – System-on-a-Chip SoC design methodology is used for complex digital circuits Current project integrates CMOS MEMS within the SoC design methodology Advantages of ES- SoC: Lowered power dissipation Reduced footprint Reduced cost Increased reliability

    4. Joshua Buck SURF 2006 4

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