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Dingjun. Huang 2009/06/ Q26974027

Nanorod formation for the electrotherapy. http://nanotechweb.org/cws/article/tech/37573/1/080136-1. Dingjun. Huang 2009/06/ Q26974027. 1. 1. Motivation. 1.Making an innovational design and application of micro/nano technology, using the skill learned last semester.

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Dingjun. Huang 2009/06/ Q26974027

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  1. Nanorod formation for the electrotherapy http://nanotechweb.org/cws/article/tech/37573/1/080136-1 Dingjun. Huang 2009/06/ Q26974027 1

  2. 1. Motivation 1.Making an innovational design and application of micro/nano technology, using the skill learned last semester. 2.Nanopillar is potential for following application 微/奈米製程於光電元件之製作與應用技術 楊啟榮

  3. 2. Experiment structure 2.1 Wafer cleaning • Prepare Si (100) wafer, submerge in the acetone with ultrasonic oscillation 5mins. • DI water clean, then submerge in the IPA with ultrasonic again. • DI water clean, then blow to dry. • Acetone then IPA, DI water and dry, place over the hot plate 110C, 5mins. • With a 1:2:6 solution of NH4OH , H2O2 and water at 80C for 15 min clean Si is the high class way. 2.2 PS preparation and coated • The PS spheres in solution with Acetone. • Dry in room temp. • Then anneal at 80C, 1hr

  4. 2.3 RIE parameter • Flow rate, 40 sccm CF4 gas, RF 40 W, • 5min 2.4 PS removed • Clean with Acetone unless no effect, just used the THF. • When removed, the first step depth are appeared. 2.5 Oxidation & removed (selected) • Oxidation chamber 1000C, 4-5hr • Use the HF to removed the oxide layer • Etch time?

  5. 2.6 Observation • Use the nanofocus or AFM to observe the profile of the surface. 2.7 Application • Clean with Acetone unless no effect, just used the THF. • When removed, the first step depth are appeared.

  6. 2.8 Materials: • Si (100)wafer: office • PS (polystyrene) spheres: buying • DI water: Center offering, washing Si. • Tetrahydrofuran (THF): buying • RIE: Center offering, CF4 is used, • Oxidation: Center offering • Ultrasonic setup: Center offering. • Nanofocus: Center offering, the measuring standard for um scale at least. • AFM and its tips: if need • Other unknown: maybe need

  7. 3. Future work: • Going on my next work to detect. One world one dream Thank you for your attention!

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