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Along with shrinking from Macro-machine to MEMS : Most of the knowledge already existing

Along with shrinking from Macro-machine to MEMS : Most of the knowledge already existing But two things adapting mechanics to micro scale that are of great importance in MEMS 1) Electrostatic effect; 2) Air damping control. Comb-drive. Electrostatic Effect.

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Along with shrinking from Macro-machine to MEMS : Most of the knowledge already existing

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  1. Along with shrinking from Macro-machine to MEMS : Most of the knowledge already existing But two things adapting mechanics to micro scale that are of great importance in MEMS 1) Electrostatic effect; 2) Air damping control

  2. Comb-drive Electrostatic Effect • The work initiated by Bill Tang and Roger Howe should have been cited for many times. • But actually no people would like to do so.

  3. Liquid Manipulation Using Electro-Wetting On Dielectric (EWOD) by C-J Kim et al，UCLA

  4. How does E and M couple each other in MEMS

  5. Electric feedback C Versatile Electrostatic effect Electric feedback damping conditioning Electrostatic Driving Inertial -ke / km =   ’ =  /(1+ )1/2 f0’= f0(1+ )1/2 Electric Tuning km > 0, ke < 0 f0 = [(km- ke )/m]1/2

  6. 17µm Positive utilization of Pull-in DMD by TI H Yang et al, IEEE SENSORS 2005

  7. 失调 : 灵敏度: 非线性: Avoiding in MEMS Sensor MH Bao et al, Sens. Actuators, 2002

  8. Improvement: Push-pull balance and feedback loop

  9. Comb-drive

  10. In electronic circuit, how we tune the frequency? Variable RF capacitors for large tuning range under low voltage IEDM 2007 IEEE E-D Lett. 2008 Electronic Lett. 2007

  11. Tunable LC-tank resonator Microelectronics J. 2007 Microwave Opt. Tech. Lett. 2008

  12. In micro-machine, how can we do

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