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P P+ T R A I N I N G P R E S E N T

P P+ T R A I N I N G P R E S E N T. Robin Wu. How PP+ Works?. ( Secondary Arm). ( Primary Arm). Wafer Handler Processing Steps. Wafer Handler Processing Steps. 10. When implant complete, the primary arm will go to the platen and remove the wafer. Wafer Handler Processing Steps.

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P P+ T R A I N I N G P R E S E N T

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  1. PP+ TRAINING PRESENT Robin Wu

  2. How PP+ Works? (Secondary Arm) (Primary Arm) VSEA Confidential

  3. Wafer Handler Processing Steps VSEA Confidential

  4. Wafer Handler Processing Steps 10.When implant complete, the primary arm will go to the platen and remove the wafer. VSEA Confidential

  5. Wafer Handler Processing Steps 15. The elevator goes to nest one slot. And the process repeats from step 1. VSEA Confidential

  6. Software Different VSEA Confidential

  7. ECO’s and Options Settings VSEA Confidential

  8. Initialization Screen VSEA Confidential

  9. Manual Screen VSEA Confidential

  10. Dual Arm calibrations - Level • Lower Handler VSEA Confidential

  11. Dual Arm calibrations - Level • Upper Handler VSEA Confidential

  12. Dual Arm Controller Install VSEA Confidential

  13. Dual Arm Controller Offset Upper Lower E15000206 Lower Upper VSEA Confidential

  14. Controller Settings - Tuning Procedure VSEA Confidential

  15. Controller Settings - Zero Off set R29 • 1.Handler Stop • 2.Measure TP1 and TP3, adjust R29 to 0.000 +-0.001VDC. • 3.Measure J4-1 & J4-2, adjust OFFSET on PCB’s amplifier to 0.000 +- 0.020 VDC. • Repeat step 2 & 3 until both measurement close to 0 VDC. J4-1 & J4-2 TP1 & TP3 VSEA Confidential

  16. Upper Handler Install VSEA Confidential

  17. Upper Handler Calibration- Idle • [Stop] and move the Upper Handler to the hard stop. • Key in the revised number. VSEA Confidential

  18. Upper Handler Calibration- Home VSEA Confidential

  19. Upper Handler Calibration- Platen VSEA Confidential

  20. Orienter calibration VSEA Confidential

  21. Orienter Calibration Low Position VSEA Confidential

  22. Orienter Calibration High Position VSEA Confidential

  23. Orienter Calibration High Position VSEA Confidential

  24. Reflective Wafer Sensor VSEA Confidential

  25. Reflective Wafer Sensor Sensitivity Adjustment Operation mode selector switch Sensitivity adjustment trimmer • The red LED indicate the sensor output is on • The green LED indicate the sensor operation is stable VSEA Confidential

  26. 1. Set the Mode Selector Switch to the “L” position. • 2. Move the reflective tape away from to the sensors view. • 3. Rotate the sensor fully CCW and then rotate the trimmer CW until the red LED illuminates. “A” Position Fully CCW then CW to illuminate the “Red” LED. VSEA Confidential

  27. 4. Move the reflective tape under the sensor and verify the green and red LEDs are on . • 5. Tune the trimmer CCW from “A” until the green LED off. “B” Position • 6. Adjust the trimmer to the center of “A” & “B” VSEA Confidential

  28. Cycle Test (VAC) VSEA Confidential

  29. Implant Monitor Screen VSEA Confidential

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