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The future of rad-tol electronics for HEP. Giovanni Anelli & Alessandro Marchioro CERN Experimental Physics Division Microelectronics Group. What comes after. SLHC Luminosity: ~ 10 35 fb -1 Beam cms energy: ~ same Radiation levels (5 years): 200 Mrad @ 7 cm, 40 Mrad @ 20 cm
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The future of rad-tolelectronics for HEP Giovanni Anelli & Alessandro Marchioro CERN Experimental Physics Division Microelectronics Group G.A. & A.M. - CERN
What comes after • SLHC • Luminosity: ~ 1035 fb-1 • Beam cms energy: ~ same • Radiation levels (5 years): 200 Mrad @ 7 cm, 40 Mrad @ 20 cm • Compensate for higher intensity through higher segmentation • Cost: lower than current ! • Power/channel must decrease G.A. & A.M. - CERN
What if SLHC ? • If 5x luminosity [1] tracker would require: • 2 x speed • 2x segmentation 20 M channels • 25% higher occupancy • Assuming that (magically) FE power/ch remains the same, the CMS tracker would require: • Ptot = 60 kW • Pcables = 150 kW • CablesF : double, cooling pipes: double [1] This is purely hypothetical, actual numbers may change G.A. & A.M. - CERN
Outline • Where is technology going (anyway) • Problems with following technology • What makes CMOS rad-tolerant • Is technology all what we need ? G.A. & A.M. - CERN
Saving power: Technology LHC Start SLHC Start 1997 1999 2001 2003 2006 2009 2012 Overall Characteristics Transistor density(2) 3.7 M/mm2 6.2 M/mm2 10 M/mm2 18 M/mm2 39 M/mm2 84 M/mm2 180 M/mm2 Chip size(3) 300 mm2 340 mm2 385 mm2 430 mm2 520 mm2 620 mm2 750 mm2 Local clock frequency(4) 750 MHz 1.25 GHz 1.5 GHz 2.1 GHz 3.5 GHz 6 GHz 10 GHz Power supply voltage(5) 1.8-2.5V 1.5-1.8V 1.2-1.5V 1.2-1.5V .9-1.2V .6-.9V .5-.6V Maximum power(6) 70 W 90 W 110 W 130 W 160 W 170 W 175 W Technology Requirements µP channel length(1) .20 µm .14 µm .12 µm .10 µm 70 nm 50 nm 35 nm DRAM ½ pitch(1) .25 µm .18 µm .15 µm .13 µm .10 µm 70 nm 50 nm Tox Equivalent(7) 4-5 nm 3-4 nm 2-3 nm 2-3 nm1.5-2 nm <1.5 nm <1.0 nm Gate Delay Metric CV/I(7) 16-17 ps 12-13 ps 10-12 ps 9-10 ps 7 ps 4-5 ps 3-4 ps Solutions Exist Solutions Being PursuedNo Known Solution G.A. & A.M. - CERN
Moore’s law 1965: Number of Integrated Circuit components will double every year G. E. Moore, “Cramming More Components onto Integrated Circuits”, Electronics, vol. 38, no. 8, 1965. 1975: Number of Integrated Circuit components will double every 18 months G. E. Moore, “Progress in Digital Integrated Electronics”, Technical Digest of the IEEE IEDM 1975. 1996: The definition of “Moore’s Law” has come to refer to almost anything related to the semiconductor industry that when plotted on semi-log paper approximates a straight line. I don’t want to do anything to restrict this definition. - G. E. Moore, 8/7/1996 P. K. Bondyopadhyay, “Moore’s Law Governs the Silicon Revolution”, Proc. of the IEEE, vol. 86, no. 1, Jan. 1998, pp. 78-81. http://www.intel.com/ An example: Intel’s Microprocessors G.A. & A.M. - CERN
When will it stop ? Tox (A) Carver Mead’s Law tox = 210 * L 0.77 from C. Mead, ‘Scaling of MOS Technology to Submicron Feature Sizes’, Journal of VLSI Signal Processing, July 1994 G.A. & A.M. - CERN
Why is CMOS so widespread? IC market is driven by digital circuits (memories, microprocessors, …) Bipolar logic and NMOS - only logic: too high power consumption per gate Many improvements in the manufacturing technology made CMOS technologies a reality Modern CMOS technologies offer excellent performance: high speed, low power consumption, VLSI, low cost, high yield CMOS technology occupies a dominant position of the IC market G.A. & A.M. - CERN
Following technologies • We have no choice other than follow industry, but: • Industry may move to SOI • Substrates and isolation will change • Gate oxides are going down to atomic levels • Our volume is dangerously small • CMOS is engineered primarily for digital applications • VDD is going down (analog harder and harder) • Most of our circuits are mixed signal and modeling for analog is poorer • ¼ micron is well adapted to our designs, was it just “good luck” ? G.A. & A.M. - CERN
Constant field scaling • L, W, tox, xD, V, VT, C, I, scale by 1/ • Area, Power diss. for a given circuit, Charges scale by 1/ • Power diss. per unit area, Charges per unit area do not scale 2 B. Davari et al., “CMOS Scaling for High Performance and Low Power - The Next Ten Years”, Proc. of the IEEE, vol. 87, no. 4, Apr. 1999, pp. 659-667. G.A. & A.M. - CERN
Constant field scaling problem Subthreshold slope and width of the moderate inversion region do not scale!!! log ID nA pA 0 V VGS G.A. & A.M. - CERN
Challenges for the future(See the talk by Y. Taur 9/Jul/01) • Lithography • Leakage currents • Gate oxide (materials, tunneling, reliability) • Wiring and interconnections (materials) • Many metal layers (up to 10) • Design complexity (CAD tools) • Cost of fabs G.A. & A.M. - CERN
Power: Not only our problem… Source: P. Gelsinger, Intel Corp. Presentation at the ISSCC 2001 G.A. & A.M. - CERN
Problem: device leakage Source: D. Frank et al., Proceedings of the IEEE, 3/2001 0.1 mm technology Will have a leakage Current of 100A/cm2 Source: P. Gelsinger, Intel Corp. Presentation at the ISSCC 2001 G.A. & A.M. - CERN
Ideal “Analog Technology” …Several considerations suggest that the 0.35 mm or perhaps the 0.25 mm [BiCMOS technology] will be adequate… B. Gilbert, “Analog at Milepost 2000”, Proc. of the IEEE, 3/2001 Reasons: • Cost of high performance technologies • No need for extreme scaling in analog • Limited supply voltage • Limited topologies • Limited signal swing (dyn-range) G.A. & A.M. - CERN
Scaling impact on analog circuits With tox reduced and for the same device dimensions: • Threshold voltage matching improves • 1/f noise decreases • Transconductance increases (same current) G.A. & A.M. - CERN
Scaling impact on analog circuits • New noise mechanisms • Modeling difficulties • Lack of devices for analog design • Reduced signal swing (new architectures needed) • Substrate noise in mixed-signal circuits • Velocity saturation. Critical field: 3 V/m for electrons, 10 V/m for holes G.A. & A.M. - CERN
What makes CMOS rad-tol • Radiation tolerant design • The Enclosed Layout Transistor (ELT) • Guard rings • SEE tests G.A. & A.M. - CERN
Transistor level leakage (NMOS) Parasitic MOS Source Parasitic channel Drain Field oxide Trapped positive charge Bird’s beak G.A. & A.M. - CERN
Single Event Upset (SEU) Static RAM cell VDD VDD Highly energetic particle 1 0 0 1 1 0 GND GND G.A. & A.M. - CERN
VT and tox scaling G.A. & A.M. - CERN
Radiation tolerant layout approach TID Radiation Tolerance ELT’s and guard rings + = Vth n tox speed low power VLSI low cost high yield Deep sub-m means also: G.A. & A.M. - CERN
Enclosed Layout Transistor (ELT) G G D S S D ELTs solve the leakage problem in the NMOS transistors At the circuit level, guard rings are necessary G.A. & A.M. - CERN
Effectiveness of ELTs 0.7 m technology - tox = 17 nm G.A. & A.M. - CERN
Effectiveness of ELTs 0.5 m technology - tox = 10 nm G.A. & A.M. - CERN
ELT & deep submicron Prerad and after 13 Mrad No leakage No VT shift 0.25 mm technology - tox = 5 nm G.A. & A.M. - CERN
Total dose results up to 30 Mrad Threshold voltage Leakage current Annealing Annealing Output conductance Mobility degradation: < 6% NMOS < 2% PMOS NMOS L=0.28 PMOS L=0.28 NMOS L=2 0.25 m technology PMOS L=2 G.A. & A.M. - CERN
Radiation tolerant layout approach p+ guard ring n+ guard ring OUT IN VSS VDD metal polysilicon n+ diffusion p+ diffusion G.A. & A.M. - CERN
Single Event Upset tests Nevents s = (cm2/bit) F•Nbits Static register, un-clocked mode ssat=2.59e-7 cm2 LETth=14.7 MeVcm2/mg W=29.9 MeVcm2/mg S=0.863 Design hardened register: LETth between 63 and 89 MeVcm2mg-1 at 89 MeVcm2mg-1, s < 10-8 cm2/bit F. Faccio et al., “Single Event Effects in Static and Dynamic Registers in a 0.25 m CMOS Technology”, IEEE Transactions on Nuclear Science, vol. 46, no. 6, Dec. 1999 , pp. 1434-1439. G.A. & A.M. - CERN
Comparison with the general trend This static cell P.E. Dodd et al., “Impact of technology trends on SEU in CMOS SRAMs”, IEEE Transactions on Nuclear Science, vol. 43, no. 6, Dec. 1996, pp. 2797-2804. G.A. & A.M. - CERN
What if deeper submicron ? • SEU will be an even bigger problem • Possible remedies • Triple redundant logic • Error correcting logic • Self-checking FSM • Consequences • Higher power consumption G.A. & A.M. - CERN
Density and speed A B Area A Area B 3.2 2.2 Area D Area C VDD [V] Delay [ps] Pwr [W/MHz] Area [m2] 0.6 m 3.3 114 1.34 162 0.25 m 2 48 0.14 50 C D A & B : 0.6 m standard C & D : 0.25 m rad-tol Inverter with F.O. = 1 G.A. & A.M. - CERN
Is technology enough ? • The next issue is power consumption, and not just technology • Need work at all levels • Technology • Circuits • Architecture • Algorithms G.A. & A.M. - CERN
Power in CMS Tracker: worst case 1) • Total # channels: 75,500 FE chips x 128 = ~10M • Power/FE: 2.3 mW/channel • Pwr/ch data TX: ~0.6 mW/channel • Supply: 2.5 V and 1.25 V, Ptot= ~30 kW • Total FE currents: IDD125: ~7.5 kA, IDD250: ~6.5 kA • Remote supplies # of service cables: 1,800 • Power in the cables: > 75 kW • Cross section of power cables and cooling pipes directly proportional to power dissipated ! 1) Worst case is computed after 10 years of irradiation G.A. & A.M. - CERN
Material budget in CMS Tracker G.A. & A.M. - CERN
Saving power in VLSI circuits • Technology scaling • Advanced technology, packaging, scaling • Circuit and logic topologies • Device sizing, Logic optimization (digital), Power down (sleep) mode • Architecture (analog and digital) • Signal features (e.g. correlation), Data representation, Concurrency, Partitioning • Algorithms • Regularity, Data Representation, Complexity G.A. & A.M. - CERN
Designing chips Designing chips is very difficult • Need clear objectives • Errors are “unforgiving” • Need complex tools • Analog designers suffer of frequent technology changes • Most HEP designs are “mixed” A-D (even worse !) • Need large teams and large investments • Need time and continuous training • Need good engineers • Need long term commitments • Need complex infrastructure • Need stable partnership with foundry • Need good and supportive management • The last 10% takes 90% of the time G.A. & A.M. - CERN
Time investment: Custom components APV25 Detector Control Unit (DCU) G.A. & A.M. - CERN
Example: Library development • First approach ”Well, let’s layout some gates and we are done…” • Reality • Complete set of tools to fit library into CAD system • Simulation (timing) models of each gate under all load and operating conditions • Models for synthesis • Wire load models (small, medium, large designs) • Extraction models • Iterate with each new release of tools G.A. & A.M. - CERN
Reliability: how much risk can you take ? • Did you simulate process corners ? • Device/technology modeling • Did you look at electro-migration ? • Did you optimize your design for yield ? • ESD: are you following the rules ? • How safe is your protection circuit ? • How well was the chip characterized ? • IC Tester or application specific test-bench ? • If the chip works ok on the ASTB, how much margin do you really have ? • Will your users follow your application recommendation ? G.A. & A.M. - CERN
Miscellaneous issues • Industry is moving to 12” wafers • The total need for microelectronics for LHC in 1998 was corresponding to small % of the annual production of typical producer in industry • We need a large number of prototyping cycles: • Do we have the money ? • Will they care about us ? • Do we have the structure necessary to design large chips ? G.A. & A.M. - CERN
Conclusions • Our community has no choice other than follow the trend in industry • But we are not ‘normal’ users, need access to more info that foundries typically give • To adapt a technology for rad-tol requires many man-years of work: Need to work with a ‘minimum’ of technologies • Don’t look at the cheapest (short-term) because what really matters is service and support • Our cost is dominated by design cost and not production G.A. & A.M. - CERN
Web • Slides summarizing some of the talks organized for the microelectronics day organized by Erik Heijne at:http://cern.ch/Snowmass2001 G.A. & A.M. - CERN