Technology CAD (including Lecture-Tutorial-Laboratory Modules)

1. Technology CAD(including Lecture-Tutorial-Laboratory Modules) Dept. of Electronics & ECE Indian Institute of Technology-Kharagpur First R & D Centre in Information and Communication Technology (ICT) Development among IITs and Universities in India PI: Prof. C. K Maiti, Co-PI: Prof A. S Dhar, and Prof A. Halder

2. Research & Development focus • To develop e-learning materials for Technology CAD (TCAD) Course (including tutorial and laboratory modules) for final year undergraduates and postgraduate students and implement Technology CAD (TCAD) online simulation laboratory — real time simulation laboratory accessed through the Internet which can expand the range of simulation experiments in Technology CAD, transmit online instructions and study materials for anyone, anywhere and anytime. • Development of e-content for an integrated teaching environment which allows for the provision of online live lectures (a 40-lecture module with tutorials) and a laboratory (10-12 simulation experiments) session for geographically dispersed students.

3. Steps for Development of RealTIME Measurement-based Internet Laboratory Design of Experiment Remote Operation of the Instruments (via LabVIEW, IC/CV lite, Easy Expert, VEE etc) Conversion to Web Application Launching on the Internet

4. Total Budget Outlay (Rs. in lakhs) Years Head 1st 2nd 3rd Total Capital Equipment Rs. 80.00 - - 80.00 FE Comp. Consumable stores Rs. 10.00 10.00 10.00 30.00 Software/License Fee Duty on import (if any) Rs. nil nil nil nil Manpower (JPA/RS/Eqv.) Rs. 7.00 8.00 9.00 24.00 Travel & Training Rs. 3.00 4.00 5.00 12.00 Contingencies/Accessories Rs. 10.00 13.00 16.00 39.00 Grand Total (FE Comp.) 110.00 35.00 40.00 185.00 Grand Total : Rs. 185.00 lakhs

5. Course Description Text Book: G. A. Armstrong and C. K. Maiti, "TCAD for Si, SiGe and GaAs Integrated Circuits“, The Institution of Engineering and Technology (IET), UK, 2008. 40-50 lectures including tutorial based on the following contents: Introduction and overview; History and structures; The role of TCAD for Semiconductor technology development; TCAD principles; Physics of VLSI fabrication technology; Tool Integration; Structure editing and mesh generation; CMOS and Bipolar Process technology Si, SiGe, III-V Semiconductors; Process modeling and simulation – general; Simulation of device characteristics;

6. Device level simulation challenges; Introducing new device models; Heterojunction device modeling; Simulation of silicon germanium (SiGe) HBTs; Simulation of heterostructure FETs (HFETs); Simulation of AlGaAs/GaAs devices; Virtual Wafer Fabrication (VWF) automation tools; Example of VWF methodology; Extraction of DC and SPICE model parameters; Small signal AC analysis for CMOS and bipolar transistors; Application of mixed-mode simulation; TCAD calibration procedure; Process compact model, Design for manufacturing (DFM), Integration into the CADENCE design framework.

7. VLSI Engineering Laboratory Module will consist of the following experiments • Doping Profile Determination • Bipolar Device Characterization • MOS Capacitor Characterization • MOSFET Characterization • High Frequency Characteristics of BJT • MOSFET SPICE Parameter Extraction • Bipolar Transistor SPICE Parameter Extraction • 1/f Noise Characterization in Transistors • Low Temperature Characterization of Transistors • LNA Characterization • Noise Modeling in MOSFETs • Cutoff Frequency Determination

8. What is Technology CAD (TCAD)Rising Technological Complexity Gate insulator •SiO2/HiK •Leakage •Trapping Gate •Work function •Depletion Channel •Mobility Raised S/D •Material •Activation •Diffusion S/D extension •Activation •Junction (USJ) Device Scaling = More Simulation Needed Application: Design, analyze and optimize semiconductor technologies and devices

9. Full TCAD Flow

10. TCAD Optimization and Manufacturability TCAD Simulations PCM Generate new data Manufacturing Visual querying & Visual optimization

11. Marked process conditions indicate low sensitivity of the device characteristics to the variations in corresponding Set of process (RED marked) Sensitivity, uncertainty & yield analysis Determine the most stable process condition

12. Yield analysis Devicespec limits

13. Some Strained-Engineered Devices

15. Some available facilitiesHardware facilities NetLAB Server Software Server

16. Network Analyzer Noise Figure Analyzer Spectrum Analyzer DC Probe station

17. AFM Setup Agilent Semiconductor Test Analyzer

18. Software facilities • Instrument Control software LabVIEW, VEE, VSA, IC-CAP, IC/C-V light, EasyExpert, Microsoft Inst., etc. • TCAD software SILVACO, Sentaurus, MEDICI, TSupreme, Taurus, Monte Carlo, HSPICE, Nanosim, PCM studio, PARAMOS, etc.

19. Requirements: List of Equipment • Four Probe Resistivity Meter (25 lakhs) • Mask Aligner (75 lakhs) • Clean Air station (20 lakhs) • Rapid Thermal Annealing System (45 lakhs) • Semiconductor Test System (35 lakhs) • Microwave/ECR Plasma System (55 lakhs) • DC/RF Sputtering System (45 lakhs) • Probe station (50 lakhs) • Programmable power supply (20 Lakhs) • Thickness Measurement system (30 lakhs) • AFM/STM (30 lakhs) • Spectrum analyzer (10 Lakhs) • LCR Meter (10 lakhs) • Semiconductor Parameter Analyzer (50 lakhs) • Noise Figure Analyzer (55 lakhs) • Network Analyzer up to 26 GHz with calibration kits (200 lakhs) • Parameter extraction and device/process modeling software tools (45 lakhs)

20. Achievement in ICT Area • NetLAB based Measurement and Analysis • First On Line Laboratory Demonstration at Andhra University (AU) • First short term course on Information Communication Technology (ICT) on Hardware Laboratory at IIT-Kharagpur • Arranged several short term courses on Technology CAD (TCAD) at IIT-Kharagpur • Arranged several short term courses on Technology CAD (TCAD) outside IIT-Kharagpur

21. Book Published 1. Applications of Silicon-Germanium Heterostructure Devices, Institute of Physics Publishing (IOP), UK, 2001. 2. Silicon Heterostructures: Materials and Devices, Institute of Electrical Engineers (IEE), UK, 2001. 3. Selected Works of Professor Herbert Kroemer, Edited, World Scientific, Singapore 2008. 4. Strained-Si Heterostructure Field-Effect Devices, CRC Press, London, 2007. 5. TCAD for Si, SiGe and GaAs Integrated Circuits, IET, UK, 2008.

22. OUR Publications on INTERNET LABORATORY on MICROELECTRONICS • A. Maiti and S. S. Mahato, Online Semiconductor Device Characterization and Parameter Extraction Using World Wide Web, Proc. NCNTE, Feb. 29 – Mar. 01, pp.160-163, 2008. • A. Maiti and S. S. Mahato, Web-based Semiconductor Technology CAD (TCAD) Laboratory, 50th Intl. Symp. ELMAR-2008, Zadar, CROATIA, 10-12 September 2008. • A. Maiti and S. S. Mahato, Web-based Semiconductor Process and Device Simulation Laboratory, Proc. of ICEE2008, Intl. Conf. on Engineering Education, "New Challenges in Engineering Education and Research in the 21st Century", PÉCS-BUDAPEST, HUNGARY, JULY 27-31, 2008. • S. C. Pandey, A. Maiti, T. K. Maiti and C. K. Maiti, Online MOS Capacitor Characterization in LabVIEW Environment, International Journal of Online Engineering (iJOE), vol.5, pp.57-60, 2009. • A. Maiti, M. K. Hota, T. K. Maiti and C. K. Maiti, Online Microelectronics and VLSI Engineering Laboratory, International Workshop on Technology for Education, Bangalore, Aug 04-06, 2009.

23. Currently Available Experiments via INTERNET from IIT-KHARAGPUR(RealTIME Online Measurement-based) • Gummel Plot of a BJT • Output Characteristics of a BJT • Threshold Voltage of a MOSFET • Output Characteristics of a MOSFET • MOSFET Parameter Extraction • BJT SPICE Parameter Extraction • Low Noise Amplifier Characterization • Surface Analysis using AFM/STM • Circuit Analysis Using NI-Elvis

24. NetLAB Webpage

27. Partner/USER Institutions Our Current Partners are VIT, Vellore NIST, Berhampur OUR ONLINE LABORATORY HAS BEEN USED and TESTED BY More Than 50 ENGINEERING COLLEGES and 10 UNIVERSITIES

28. Short Term Course/Workshop AICTE/MHRD sponsored SUMMER SCHOOL at IIT KHARAGPUR May 17-23, 2009 Applications of ICT for Hardware Laboratory 52 participants from 40 Engineering Colleges

29. List of Participating Institutions • VIT University, Vellore • NIST, Berhampur • West Bengal University of Technology, Kolkata • University of Calcutta • Inst. of Radiophysics and Electronics • North Bengal University, Siliguri • NIT, Durgapur • Bengal Engg. and Science University, Shibpur • Tezpur (Central) University, Tezpur

30. IMPS College of Engg. and Technology, Malda • Gurgaon College of Engg., Haryana • Hi-Tech Institute of Technology, Khurda • National Institute of Technology, Warangal • SSN College of Engg., Tamilnadu • Synergy Institute of Engg. and Technology, Dhenkanal • Medi-caps Institute of Technology Management, Indore • Dr. BR Ambedkar National Institute of Technology, Punjab • Jaypee Univ. Of Information Tech., Solan, H.P. • Dronacharya College of Engg., Gurgaon, Haryana • CVR College of Engg., Hyderabad, A.P. • Sai Spurthi Institute of Technology, A.P. • Lingaya's Institute of Mgt and Technology, Faridabad

31. Purushottam Institute of Engg. Tech., Rourkela, Orissa • National Institute of Science & Technology, Orissa • Hi-Tech Institute of Tech., Orissa • GLAITM, Mathura, U.P. • Dr. B. C. Roy Engg. College, Durgapur • Tradient Academy of Tech., Orissa • Modern Engg. & Management Studies, Orissa • GLA Institute of Tech. & Management, Mathura • Synergy Institute of Engg. & Tech., Orissa • ITER, Bhubaneswar • Synergy Institute of Engg. & Tech., Orissa • DRIEMS, Cuttack • Lingaya’s University, Faridabad • Birla Institute of Technology, Patna • Dr. Sivanthi Aditanar College of Engg., Tamilnadu

32. PSN Group of Institutions, Tamilnadu • Orissa Engg. College, Bhubaneswar • JIET, Cuttack • Raajdhani Eng. College, Bhubaneswar • World Institute of Technology, Gurgaon • Dept. of Bio-Medical Engg., Andhra University • Andhra University College of Engg., Visakhapatnam • GITAM University, Visakhapatnam • Chaitanya college of Engg., Visakhapatnam • SRKR Engg. College, Visakhapatnam • Govt. Polytechnic, Bheemili • Sanketika Vidya Parishad Engg. College, Visakhapatnam • JNTU College of Engg., Hyderabad • National Engg. College, Tamilnadu • Institute of Technology and Management, Gurgaon

33. Thank You