VLSI Engineering (including Lecture-Tutorial-Laboratory Modules)

1. VLSI Engineering(including Lecture-Tutorial-Laboratory Modules) Dept. of Electronics & ECE Indian Institute of Technology-Kharagpur First R & D Centre in Information and Communication Technology (ICT) Development among IITs and Universities in India PI: Prof. C. K Maiti, Co-PI: Prof A. S Dhar, and Prof A. Halder

2. Research & Development focus • To develop e-learning materials for VLSI Engineering Course (including tutorial and laboratory modules) for undergraduate students and implement VLSI Engineering online laboratory — real time laboratory accessed through the Internet which can expand the range of experiments in VLSI engineering, transmit online instructions and study materials for anyone, anywhere and anytime. • The development of an integrated teaching environment which allows for the provision of online live lecture (a 50-lecture module with tutorials) and laboratory (10-12 experiments) sessions for geographically dispersed students.

3. Steps for Development of RealTIME Measurement-based Internet Laboratory Design of Experiment Remote Operation of the Instruments (via LabVIEW, IC/CV lite, Easy Expert, VEE etc) Conversion to Web Application Launching on the Internet

4. Total Budget Outlay (Rs. in lakhs) Years Head 1st 2nd 3rd Total Capital Equipment Rs. 800.00 - - 800.00 FE Comp. Consumable stores Rs. 40.00 40.00 40.00 120.00 Software/License Fee Duty on import (if any) Rs. nil nil nil nil Manpower (JPA/RS/Eqv.) Rs. 7.00 8.00 9.00 24.00 Travel & Training Rs. 3.00 4.00 5.00 12.00 Contingencies/Accessories Rs. 10.00 15.00 19.00 44.00 Grand Total (FE Comp.) 860.00 67.00 73.00 1000.00 Grand Total : Rs. 1000.00 lakhs

5. Course Description 40-50 lectures including tutorial based on the following contents: • Introduction: • Design hierarchy, layers of abstraction, integration density and Moore’s law, VLSI design styles, packaging styles, design automation principles • Fabrication Technology: • Basic steps of fabrication, bipolar, CMOS and BiCMOS fabrication processes, layout design rules

6. MOS and BiCMOS characteristics and circuits: • MOS transistor characteristics, MOS switch and inverter, BiCMOS inverter, latch-up in CMOS inverter, super-buffers, propagation delay models, switching delay in logic circuits, CMOS analog amplifier • Logic Design: • switch logic, gate restoring logic, various logic families and logic gates, PLA • Dynamic Circuits: • Basic concept, noise considerations, charge sharing, cascading dynamic gates, domino logic, np-CMOS logic, clocking schemes • Sequential Circuits: • Basic regenerative circuits, bistable circuit elements, CMOS SR latch, clocked latch and flip-flops

7. Low-power Circuits: • low-power design through voltage scaling, estimation and optimization of switching activity, reduction of switched capacitance, adiabatic logic circuits • Subsystem Design: • design of arithmetic building blocks like adders, multipliers, shifters, area-speed-power tradeoff • Semiconductor Memories: • SRAM, DRAM, non-volatile memories • Bipolar ECL Inverter: • Features of ECL gate, robustness and noise immunity, logic design in ECL, single-ended and differential ECL gates • Testability of VLSI: • Fault models, scan-based techniques, BIST, test vector generation • Physical Design: • Brief ideas on partitioning, placement, routing and compaction

8. VLSI Engineering Laboratory Module will consist of the following experiments • Doping Profile Determination • Bipolar Device Characterization • MOS Capacitor Characterization • MOSFET Characterization • High Frequency Characteristics of BJT • MOSFET SPICE Parameter Extraction • Bipolar Transistor SPICE Parameter Extraction • 1/f Noise Characterization in Transistors • Low Temperature Characterization of Transistors • LNA Characterization • Noise Modeling in MOSFETs • Cutoff Frequency Determination

9. Some available facilitiesHardware facilities ELVIS Setup NetLAB Server

10. Network Analyzer Noise Figure Analyzer Spectrum Analyzer DC Probe station

11. AFM Setup Agilent Semiconductor Test Analyzer

12. Software facilities • Instrument Control software LabVIEW, VEE, VSA, IC-CAP, IC/C-V light, EasyExpert, Microsoft Inst., etc. • TCAD software SILVACO, Sentaurus, MEDICI, TSupreme, Taurus, Monte Carlo, HSPICE, Nanosim, PCM studio, PARAMOS, etc.

13. Requirements: List of Equipment • Four Probe Resistivity Meter (25 lakhs) • Mask Aligner (75 lakhs) • Clean Air station (20 lakhs) • Rapid Thermal Annealing System (45 lakhs) • Semiconductor Test System (35 lakhs) • Microwave/ECR Plasma System (55 lakhs) • DC/RF Sputtering System (45 lakhs) • Probe station (50 lakhs) • Programmable power supply (20 Lakhs) • Thickness Measurement system (30 lakhs) • AFM/STM (30 lakhs) • Spectrum analyzer (10 Lakhs) • LCR Meter (10 lakhs) • Semiconductor Parameter Analyzer (50 lakhs) • Noise Figure Analyzer (55 lakhs) • Network Analyzer up to 26 GHz with calibration kits (200 lakhs) • Parameter extraction and device/process modeling software tools (45 lakhs)

14. Achievement in ICT Area • NetLAB based Measurement and Analysis • First On Line Laboratory Demonstration at Andhra University (AU) • First short term course on Information Communication Technology (ICT) on Hardware Laboratory at IIT-Kharagpur • Arranged several short term courses on Technology CAD (TCAD) at IIT-Kharagpur • Arranged several short term courses on Technology CAD (TCAD) outside IIT-Kharagpur

15. Book Published 1. Applications of Silicon-Germanium Heterostructure Devices, Institute of Physics Publishing (IOP), UK, 2001. 2. Silicon Heterostructures: Materials and Devices, Institute of Electrical Engineers (IEE), UK, 2001. 3. Selected Works of Professor Herbert Kroemer, Edited, World Scientific, Singapore 2008. 4. Strained-Si Heterostructure Field-Effect Devices, CRC Press, London, 2007. 5. TCAD for Si, SiGe and GaAs Integrated Circuits, IET, UK, 2008.

16. OUR Publications on INTERNET LABORATORY on MICROELECTRONICS • A. Maiti and S. S. Mahato, Online Semiconductor Device Characterization and Parameter Extraction Using World Wide Web, Proc. NCNTE, Feb. 29 – Mar. 01, pp.160-163, 2008. • A. Maiti and S. S. Mahato, Web-based Semiconductor Technology CAD (TCAD) Laboratory, 50th Intl. Symp. ELMAR-2008, Zadar, CROATIA, 10-12 September 2008. • A. Maiti and S. S. Mahato, Web-based Semiconductor Process and Device Simulation Laboratory, Proc. of ICEE2008, Intl. Conf. on Engineering Education, "New Challenges in Engineering Education and Research in the 21st Century", PÉCS-BUDAPEST, HUNGARY, JULY 27-31, 2008. • S. C. Pandey, A. Maiti, T. K. Maiti and C. K. Maiti, Online MOS Capacitor Characterization in LabVIEW Environment, International Journal of Online Engineering (iJOE), vol.5, pp.57-60, 2009. • A. Maiti, M. K. Hota, T. K. Maiti and C. K. Maiti, Online Microelectronics and VLSI Engineering Laboratory, International Workshop on Technology for Education, Bangalore, Aug 04-06, 2009.

17. Currently Available Experiments via INTERNET from IIT-KHARAGPUR(RealTIME Online Measurement-based) • Gummel Plot of a BJT • Output Characteristics of a BJT • Threshold Voltage of a MOSFET • Output Characteristics of a MOSFET • MOSFET Parameter Extraction • BJT SPICE Parameter Extraction • Low Noise Amplifier Characterization • Surface Analysis using AFM/STM • Circuit Analysis Using NI-Elvis

18. NetLAB Webpage

21. Partner/USER Institutions Our Current Partners are VIT, Vellore NIST, Berhampur OUR ONLINE LABORATORY HAS BEEN USED and TESTED BY More Than 50 ENGINEERING COLLEGES and 10 UNIVERSITIES

22. Short Term Course/Workshop AICTE/MHRD sponsored SUMMER SCHOOL at IIT KHARAGPUR May 17-23, 2009 Applications of ICT for Hardware Laboratory 52 participants from 40 Engineering Colleges

23. List of Participating Institutions • VIT University, Vellore • NIST, Berhampur • West Bengal University of Technology, Kolkata • University of Calcutta • Inst. of Radiophysics and Electronics • North Bengal University, Siliguri • NIT, Durgapur • Bengal Engg. and Science University, Shibpur • Tezpur (Central) University, Tezpur

24. IMPS College of Engg. and Technology, Malda • Gurgaon College of Engg., Haryana • Hi-Tech Institute of Technology, Khurda • National Institute of Technology, Warangal • SSN College of Engg., Tamilnadu • Synergy Institute of Engg. and Technology, Dhenkanal • Medi-caps Institute of Technology Management, Indore • Dr. BR Ambedkar National Institute of Technology, Punjab • Jaypee Univ. Of Information Tech., Solan, H.P. • Dronacharya College of Engg., Gurgaon, Haryana • CVR College of Engg., Hyderabad, A.P. • Sai Spurthi Institute of Technology, A.P. • Lingaya's Institute of Mgt and Technology, Faridabad

25. Purushottam Institute of Engg. Tech., Rourkela, Orissa • National Institute of Science & Technology, Orissa • Hi-Tech Institute of Tech., Orissa • GLAITM, Mathura, U.P. • Dr. B. C. Roy Engg. College, Durgapur • Tradient Academy of Tech., Orissa • Modern Engg. & Management Studies, Orissa • GLA Institute of Tech. & Management, Mathura • Synergy Institute of Engg. & Tech., Orissa • ITER, Bhubaneswar • Synergy Institute of Engg. & Tech., Orissa • DRIEMS, Cuttack • Lingaya’s University, Faridabad • Birla Institute of Technology, Patna • Dr. Sivanthi Aditanar College of Engg., Tamilnadu

26. PSN Group of Institutions, Tamilnadu • Orissa Engg. College, Bhubaneswar • JIET, Cuttack • Raajdhani Eng. College, Bhubaneswar • World Institute of Technology, Gurgaon • Dept. of Bio-Medical Engg., Andhra University • Andhra University College of Engg., Visakhapatnam • GITAM University, Visakhapatnam • Chaitanya college of Engg., Visakhapatnam • SRKR Engg. College, Visakhapatnam • Govt. Polytechnic, Bheemili • Sanketika Vidya Parishad Engg. College, Visakhapatnam • JNTU College of Engg., Hyderabad • National Engg. College, Tamilnadu • Institute of Technology and Management, Gurgaon

27. Thank You