Nano electro mechanical systems ( nems )

1. Nano electro mechanical systems (nems)

2. What is NEMS? • The term Nanoelectromechanical systems or NEMS is used to describe devices integrating electrical and mechanical functionality on the nanoscale. • NEMS form the logical next miniaturization step from so-called microelectromechanical systems, or MEMS devices.

3. NEMS - Definition • NEMS is the integration of sensors, actuators, electronics, photonics, energy, fluidics, chemistry, and biology into a meaningful system enabled by sub micrometer science and engineering precision.

4. Nanowires • Nanowires such as nanoLED arrays might enable a new class of nanodisplays. • But consider fabricating nanowires out of dissimilar materials such as gallium arsenic on silicon. • The ability to realize vertical nanowires composed of metals, semiconductors, and insulators on silicon and other substrates will enable new types of high performance, heterogeneous micro- and nanosystems. • And they can be formed without the usual considerations of lattice strain matching that occurs in microscale dimensions.

5. Nanowires

6. NEMS in Nano Biotechnology • NEMS will also enable other important new opportunities in the emerging field of nanobiotechnology. • The ultrasensitive detection method could replace complicated optical fluorophore tags and optical readout methods routinely used by molecular biologists with a simple electrically measured parameter—frequency. • A biocantilever diving board fabricated by Professor Michael Roukes at CalTech has shown the ability to detect small mass changes as low as 7 zeptograms, which is roughly the mass of a single protein molecule!

7. Nanoassembly • The most important area of NEMS opportunity arises— programmable self-assembly for heterogeneous nanointegration. • It is simply called as nanoassembly––a new manufacturing paradigm that allows for the directed self-assembly of components into precise locations on a substrate. • Nanoassemblymight also be used to build systems on non-planar or 3D surfaces where traditional monolithic integration has failed.

8. Approaches to miniaturization • Two complementary approaches to fabrication of NEMS systems can be found. • The top-down approach • The bottom-up approach

9. Top-down approach • The top-down approach uses the traditional microfabrication methods, i.e. optical and electron beam lithography, to manufacture devices. • Typically, devices are fabricated from metallic thin films or etched semiconductor layers.

10. Bottom-up approach • Bottom-up approaches, in contrast, use the chemical properties of single molecules to cause single-molecule components to • (a) self-organize or self-assemble into some useful conformation, or • (b) rely on positional assembly • This allows fabrication of much smaller structures, albeit often at the cost of limited control of the fabrication process.

11. Future of NEMS • NEMS devices, if implemented into everyday technologies, could further reduce the size of modern devices and allow for better performing sensors. • Carbon based materials have served as prime materials for NEMS use, because of their highlighted mechanical and electrical properties.

12. Conclusion • In summary, the MEMS revolution that began at DARPA in the early 1990s will continue to bring new and more powerful microsystems to the commercial world and defense community. • Therefore, there is no doubt that the Age of NEMS will produce exciting new capabilities we are only now beginning to imagine.

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