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Micro Electro Mechanical Systems. MEMS By Seth Austin. Materials and Fabrication. Silicon is the dominate material used Excellent electrical and mechanical properties For High Temp. applications, SiC is ideal Other alternatives include TiNi (shape memory alloys). Applications.
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Micro Electro Mechanical Systems MEMS By Seth Austin
Materials and Fabrication • Silicon is the dominate material used • Excellent electrical and mechanical properties • For High Temp. applications, SiC is ideal • Other alternatives include TiNi (shape memory alloys)
Applications • Both Military and commercial use • Automobiles • Airplanes • Home Appliances
World Market • Overwhelming commercial demand • Drastic Increase in World-wide Sales
References • Mehregany, M./ Roy, S. “Microengineering Aerospace Systems.” MEMS Market, www.aero.org/publications/aeropress/Helvajian/Helvajian_1_4.html, 10 Feb. 2004 • “MRS tackle MEMS materials issues” 10 April 2002, www.thinfilmmfg.com/subscribers/Subscriber02/mems10Apr02.htm, 10 Feb. 2004 • Bang, Chris. “EETimes.” Electrochemical method simplifies MEMS fabrification. 18 March 2002, www.eetimes.com/in_focus/communications/OEG20020315S0052, 10 Feb. 2004 • Jakubczak, Jay. “Vision for MEMS.” Micromachines. www.sandia.gov/mstc/technologies/micromachines/vision.html, 10 Feb. 2004.