Coventor Tutorial

1. Bi-Stable Mechanical Beam Simulation -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result Coventor Tutorial

2. Coventor-Process : Material Deification Change the electric conductivity of Silicon since it was doped. For detailed information on Material Deification, please refer to the Section 2.3 of the manual “Designer” ! ! !

3. Bi-Stable Mechanical Beam Simulation -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result Coventor Tutorial

4. Coventor-Process : Create Substrate For detailed information on editing process, please refer to the Section 2.4 of the manual “Designer” ! ! !

5. Coventor-Process : Oxide Formation

6. Coventor-Process : Si Formation Only this Si layer for simulation: Accurate “Thickness”!! Si layer for layout: Accurate“Layer Name”!!

7. Coventor-Process : Si Patterning

8. Coventor-Process : Metal Formation Metal layer for layout: Accurate“Layer Name”!!

9. Coventor-Process : Metal Patterning

10. Bi-Stable Mechanical Beam Simulation -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result Coventor Tutorial

11. Coventor – Create Layout For detailed information on editing layout, please refer to the Section 2.5 & 3.2.1 of the manual “Designer”! ! !

12. Coventor – Check Layers The layer names are from the pre-defined “Layer Names” in the last Process Editor!!

13. Edit by input co-ordinate Standard drawing tools Other useful functions Coventor – Edit Your Layout For detailed information on editing layout, please refer to the Section 2.5 & 3 of the manual “Designer” ! ! !

14. Coventor – Edit Your Layout For Bended beam: The beam and anchor should be merged. How? Select beam and anchor and then using “boolean->Or” for merge. Otherwise, solid model can’t be built!! ERROR For detailed information on editing layout, please refer to the Section 2.5 & 3 of the manual “Designer” ! ! !

15. Coventor – Finish Layout Two Layers: SILICON!! METAL!!

16. Coventor – Finish Layout The layout should contains TWO Layers with the names of SILICON & METAL!! The final cell name should be “top cell_Group number”, e.g., “top cell_6a” and “top cell_6b”.

17. Coventor – Flat Hierarchy Before exporting the layout to top cell, the top cell should be flattened. For detailed information on editing layout, please refer to the Section 2.5.7 of the manual “Designer” ! ! !

18. Coventor – Gds Out Chose a file to output the layout. For detailed information on editing layout, please refer to the Section 2.6.6 of the manual “Designer” ! ! !

19. Bi-Stable Mechanical Beam Simulation -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result Coventor Tutorial

20. Coventor – Initial Solid Model The SILICON is a whole bulk material! Since only SILICON layer is simulated, other can be hided. For detailed information on solid model, please refer to the Section 4.5 of the manual “Designer” ! ! !

21. Coventor – Partition Partition the Si into several parts. (Partition the beam(moved parts) from the anchor(fixed parts) . • Choose 3 points to generate a plane • Choose the plane and the Silicon bulk (needed for partition) • “Partition” under “Solid Model” For detailed information on solid model, please refer to the Section 4.5.1 of the manual “Designer” ! ! !

22. Coventor – Partition (After) After partition, one Silicon bulk is cut into two parts. Finally, the oneSilicon bulk will be cut into many parts. After partition, the plane can be hided. After several times of partition, the beams will be completely separated from the anchor. For detailed information on solid model, please refer to the Section 4.5.1 of the manual “Designer” ! ! !

23. Coventor – Add Layer to Mesh Model Select ALL Silicon parts and add them to Mesh Model For detailed information on solid model, please refer to the Section 4.7 of the manual “Designer” ! ! !

24. Coventor – Add Layer to Mesh Model ALL Silicon parts move into Mesh Model For detailed information on Mesh model, please refer to the Section 4.7 of the manual “Designer” ! ! !

25. Coventor – Meshing Settings For detailed information on Mesh model, please refer to the Section 4.7 of the manual “Designer” ! ! !

26. Coventor – Generate Meshing Select ALL Silicon parts and Generate Mesh. For detailed information on Mesh model, please refer to the Section 4.7 of the manual “Designer” ! ! !

27. Coventor – Finish Meshing

28. Coventor –Naming Entities Name electrodeson the topfaces! “Potential” will be applied on these faces. For detailed information on Mesh model, please refer to the Section 4.6 of the manual “Designer” ! ! !

29. Coventor –Naming Entities Name anchors on the bottom faces! “Fixall” and “Temperature” will be applied on these faces. For detailed information on Mesh model, please refer to the Section 4.6 of the manual “Designer” ! ! !

30. Coventor –Naming Entities Name the front faces or other needed faces of the actuator, amplifier or bistable beam on the side faces! “Pressure” or “Displacement” will be applied on these faces For detailed information on Mesh model, please refer to the Section 4.6 of the manual “Designer” ! ! !

31. Bi-Stable Mechanical Beam Simulation -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result Coventor Tutorial

32. Coventor – Solver Setting Choose the 2nd solver Choose your mesh model & then Set the solver For detailed information on editing layout, please refer to the Section 3.5 of the manual “analyzer_standard” ! ! !

33. Coventor – Solver Setting

34. Coventor – Surface Boundary conditions • Example: apply voltage to actuator to analysis the temperature, displacement, stress and so on. • Fixall for anchor • Set the temperate of all anchor as room temperature (300K). The units is “K”. • Apply voltage to electrodes. The units is “voltage”. For detailed information on setting boundary conditions, please refer to the Section 3.5.3 of the manual “analyzer_standard” ! ! !

35. Coventor – Surface Boundary conditions • For other simulations: • “Fixall” and “Temperature” are always applied on anchor faces. • “Potential” can be applied on electrode faces. • “Pressure” or “Displacement” can be applied on side faces

36. Coventor – SBCs for Bistable Beam For detailed information on Simulation methodology of Bistable Beam, please refer to the “Tutorial on simiulation of bistable beam” ! ! ! Apply oneDisplacementto get oneForce

37. Coventor – Displacement-Force Simulation • For simulation, one can not solve an arbitrary displacement directly, according to my experience. Instead, one need to increase the displacement bit by bit from zero, and telling Coventor to start the analysis from the result of the previous one. • In this manner, the simulation will not fail easily, because defining the displacement resolves the large non-linearity of buckling.

38. Coventor – One or Multi Point Simulation • Correspond the displacement to a variable, “mechBC1”, based on “MemMech” Solver. 4. Set the value 3. Set the Trajectory 6. Run here for simulating one value 3. Correspond the “mechBC1” to a Trajectory 2. Start to set Variable 5. Run here for simulating a series of values

39. Coventor – Contact Boundary Conditions If you want to use the actuator to push the amplifier, Plan: ACT CON or use the amplifier to push the beam Plan: AMP CON2 you need to define the Planes of actuator, amplifierand beam as contact planes. Otherwise, they actuator will move across the amplifier, or the amplifier will move across the beam rather than push it. Plan: BEAM CON Plan: AMP CON1

40. Bi-Stable Mechanical Beam Simulation -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result Coventor Tutorial

41. Coventor – Simulation Real-time Simulation Progress/health Monitoring

42. Coventor – View Resluts For detailed information on Visualizer, please refer to the Section 9 of the manual “analyzer_standard” ! ! !

43. Coventor – 3D Result Viewing For detailed information on Visualizer, please refer to the Section 9 & 9.1 of the manual “analyzer_standard” ! ! !

44. Coventor – Simulation Result of the Displace-Fore of Bistable Beam Checking the displacement deformation using Geometry Scaling For detailed information on Visualizer, please refer to the Section 9 & 9.4 of the manual “analyzer_standard” ! ! !

45. Coventor – Simulation Result of the Displace-Fore of Bistable Beam Checking the Force Value using Table – rxnForces. Sign of rxnForces changes from + to – or – to +, indicating two stable states. For detailed information on Visualizer, please refer to the Section 9 & 9.4 of the manual “analyzer_standard” ! ! !