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ME 381R Lecture 13-14 Semiconductor Devices and Thermal Issues

ME 381R Lecture 13-14 Semiconductor Devices and Thermal Issues. Dr. Li Shi Department of Mechanical Engineering The University of Texas at Austin Austin, TX 78712 www.me.utexas.edu/~lishi lishi@mail.utexas.edu. Reading: 1-7-1 & Ch. 7 in Tien et al. Depletion Region.

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ME 381R Lecture 13-14 Semiconductor Devices and Thermal Issues

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  1. ME 381R Lecture 13-14 Semiconductor Devices and Thermal Issues Dr. Li Shi Department of Mechanical Engineering The University of Texas at Austin Austin, TX 78712 www.me.utexas.edu/~lishi lishi@mail.utexas.edu Reading: 1-7-1 & Ch. 7 in Tien et al.

  2. Depletion Region p-n Junction w/o Bias

  3. Biased p-n Junction

  4. Metal-Oxide-Semiconductor (MOS) Capacitor : Electron Affinity : Work Function Energy Band Diagram before making contact n-type

  5. MOS Capacitor W/O Bias (Special Case: M = S) Energy Band Diagram after making contact

  6. Accumulation and Depletion of Majority Carriers Block Charge Diagram Vi Very thin eVG VS VG

  7. Inversion Layer: C majority carrier >C minority carrier

  8. Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET)

  9. Ideal MOSFET VG>0

  10. Pinch-Off & IV

  11. Thermal Circuit Particle transport theory Fourier’s law of heat conduction

  12. Joule Heating inHigh-Field Devices Localized heat generation near the pinch-off point

  13. Thermal Topographic Z T X X Thermometry of Nanoelectronics Scanning Thermal Microscope: Atomic Force Microscope (AFM) + Thermal Probe Laser Deflection Sensing Cantilever Temperature Sensor Sample X-Y-Z Actuator

  14. 10 mm Microfabricated Probes Pt Line Tip Pt-Cr Junction Laser Reflector SiNx Cantilever Cr Line Shi, Kwon, Miner, Majumdar, J. MicroElectroMechanical Sys., 10, p. 370 (2001)

  15. Self Heating Effect on I-V

  16. Optical Phonon Emission at High Field

  17. Heat Transfer Path

  18. Governing Equations for Electro-Thermal Simulation of Devices

  19. Example

  20. Computation Scheme

  21. Results

  22. Electric Field

  23. Electron Temperature

  24. Phonon Temperature

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