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Ion Implantation and Temperature  HEROS Modeling

Ion Implantation and Temperature  HEROS Modeling. Qiyang Hu , Shahram Sharafat, Nasr Ghoniem Mechanical & Aerospace Engineering University of California, Los Angeles San Diego, Aug 8 th , 2006. Objectives. Calibrate HEROS with a wide range of applications :

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Ion Implantation and Temperature  HEROS Modeling

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  1. Ion Implantation and Temperature  HEROS Modeling Qiyang Hu , Shahram Sharafat, Nasr Ghoniem Mechanical & Aerospace Engineering University of California, Los Angeles San Diego, Aug 8th, 2006

  2. Objectives • Calibrate HEROS with a wide range of applications: • Deep implantation in pulses by UNC • Shallow implantation in steady states by IEC condition • Shallow implantation in steady states by Nishijima’04 Leads to confidence in predicting IFE conditions

  3. HEROS Code Improvement • Simulation Discussion • Conclusions and Future Plans

  4. Previous HEROS code has serious numerical instability problems: In most cases: • Time to be simulated < 10 sec • Running Time > 6 hours • Time step > 2000 steps • Temperature range < 2000 K

  5. HEROS model is improved: • Still, reaction-diffusion rate equation: • Simplify the equation • Ignore some cluster effects: (e.g. vacancy clusters, interstitial clusters etc.) • 18 variables/equations  13 • Ignore bubble coalescence

  6. HEROS numerical scheme: Temperature profile Within a bin, each C(i) isin an average sense Implantation profile … W back W front variable bin size

  7. Recent Progressesin Modeling Helium Behavior: • Can integrate equations for thousands of pulses. • Can include rapid temperature transients. • Aim to calibrate model with experimental data.

  8. HEROS Code Improvement • Simulation Discussions • Conclusions and Future Plans

  9. First, we want to use our new HEROS code to model UNC(’05) &UWM(’04) conditions. We re-simulated UNC & UWM’s implantation cases Helium Implantation Damage

  10. UNC’s Temperature Profile (C) ( L. Sneed,2005 )

  11. After 1 cycle of 1019 He/m2: Temperature C 2000C 850C 3000 3060 Time (sec)

  12. After 10 cycle of 1018 He/m2/cycle: Temperature C 2000C 850C 300 360 720 Time (sec)

  13. After 100 cycle of 1017 He/m2/cycle: Temperature C 2000C 850C 30 90 180 Time (sec)

  14. After 1000 cycle of 1016 He/m2/cycle: Temperature C 2000C 850C 3 63 126 Time (sec)

  15. Helium Retention: Diffuse too fast in HEROS Short pulse OK! Cycles: 1000 100 10 1

  16. Bubble & Radius Movies: HEROS also gives the spatial distribution information Bin Number=20; Total width=10m

  17. For UWM’s IEC conditions: Some notes before comparisons: • Surface bubble  Surface pore • Surface bubble density  (volume bubble density|surf)2/3 • We focus on steady condition.

  18. New HEROS code is stable and gives the information about bubble (pore) sizes:

  19. So does the pore density …

  20. We also calibrate our model by Nishijima group’s experiments (ITER): Temperature: = 1950 C Gh 1m x

  21. HEROS also gives the spatial distribution information (average sense): Bin Number=20; Total width=10m

  22. HEROS for temperature modeling: Surface Heating Emissive effect can be ignored B.C. Max

  23. HEROS Code Improvement • Simulation Discussion • Conclusions and Future Plans

  24. Conclusions: • Capabilities of HEROs code are largely improved • Our HEROS can integrate equations : • with thousands of pulses. • with rapid temperature transients. • Need to improve: • Helium: More trapping mechanism • Heat: new mechanism

  25. Planning on HEROS: • Implement recent “pulsed” conditions: • UWM • UNC • Implement IFE conditions • Add bubble coalescence • Exceed the 0-order (average) description • Temperature/carbon diffusion problem

  26. We wish to develop a unified temperature/diffusion/microstructure code Containing: • Temperature transients • Helium distribution • Carbon distribution • Point defect/displacement damage

  27. Thanks!

  28. Backup Slides

  29. Helium retention for IEC condition: Most of He are in grain boundary

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