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Measurements of the Flat Band Voltage across the wafer

Measurements of the Flat Band Voltage across the wafer. PQC FIRENZE. MOS 4. OB2 Wafer. MOS Standard Moon. MOS 3. MOS 2 , STM measures Vfb on this side. PQC FIRENZE. N.B. STM values to be compared with MOS2. MOS 1 MOS2 STM MOS3 MOS4.

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Measurements of the Flat Band Voltage across the wafer

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  1. Measurements of the Flat Band Voltage across the wafer PQC FIRENZE

  2. MOS4 OB2 Wafer MOSStandard Moon MOS3 MOS2 , STM measures Vfb on this side PQC FIRENZE

  3. N.B. STM values to be compared with MOS2 MOS 1 MOS2 STM MOS3 MOS4 30210431015109PISA 75 11.8 10.2 11.8 11.8 30210431015217 PISA 79 12.2 10.410.2 12.6 13.4 PISA79 30210431015212 12.0 9.89.4 12.6 13.0 PISA81 30210432000621 11.8 10.810.8 11.6 11.4 30210431215004PISA 82 5.0 5.66.0 5.4 5.0 30210431215004PISA 83 7.0 5.25.4 10.8 9.2 • No variation in the result performing the measurements at 75 or 100 KHz • Batches rejected due to high Flat Band Voltage (and also high surface currents) in 2003 • PISA 75 (310 149, 310 151, 310 156) • PERUGIA 36 (309 218, 311 126 ) • PISA 79 (310 152) • PISA 81 (320 006, 311 130, 319 151, 313 003) PQC FIRENZE

  4. Vfb values from Standard Moon and Vfb from STM PQC STM PQC STM 30210431034004PISA 80 2.43.6 30210430922003PISA 83 5.85.2 30210430922005PISA 83 7.05.4 30210431034016PISA 80 3.84.2 30210430922017PISA 83 5.25.6 30210431112907PISA 80 3.44.2 30210430922023PISA 83 4.65.2 30210432000621PISA 81 11.810.8 30210431914903PISA 83 4.65.4 30210431113002PISA 81 11.810.6 30210431914911PISA 83 7.06.8 30210431915105PISA 81 11.410.4 30210431914914PISA 83 7.07.6 30210431300302PISA 81 12.010.2 30210431914922PISA 83 14.68.4 30210431215004PISA 82 5.0 6.0 30210431215020PISA 82 4.6 5.4 30210431215406PISA 82 4.2 5.0 30210431215423PISA 82 4.4 5.2 PQC FIRENZE

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