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Laser displacement sensor (LDS)

Laser displacement sensor (LDS). http://www.em4sys.com/. Diffused reflection type. The light source (LD: Laser Diode) and PSD (Position sensitive detectors) are placed in one body. The laser beam is reflected by the surface (paper, plastic, metal, etc) that is in motion.

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Laser displacement sensor (LDS)

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  1. Laser displacement sensor (LDS) http://www.em4sys.com/

  2. Diffused reflection type • The light source (LD: Laser Diode) and PSD (Position sensitive detectors) are placed in one body. The laser beam is reflected by the surface (paper, plastic, metal, etc) that is in motion http://www.measurecentral.com/technology/semiconductor.php

  3. Direct reflection type • The light source (LD) and PSD are placed in one body. The laser beam is reflected by the mirror attached to the moving surface

  4. Measurement Principle Light spot falls on the PSD Electric charge (Proportional to the light energy) Charge is driven and collected by electrodes Photo-currents by the electrodes are inversely proportional to the distance Photo-currents are processed using the processing board We can get the distance from output voltage

  5. Our Setup (Total reflection type) • Head model: TBMPH • Processing board model: ASPB-TRI • Full scale (FS): ±10 mm • Nominal distance: 32 mm • Resolution: FS/4000(peak-peak) FS/10000(R.M.S) • Bandwidth: 100 Hz • Non-linearity: below 0.2 % • Output: ±10 V • Wavelength: 850 nm, 5 mW • Power: AC 220 V/ 60Hz

  6. Stage Z Movement Measurement Optical head Up and down according to the distance between sensor and mirror Stage up and down

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