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Microelectronics & Device Fabrication

Microelectronics & Device Fabrication. Vacuum Tube Devices. Thermionic valve. Two (di) Electrodes (ode). Vacuum Tube Devices.

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Microelectronics & Device Fabrication

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  1. Microelectronics & Device Fabrication

  2. Vacuum Tube Devices Thermionic valve Two (di) Electrodes (ode)

  3. Vacuum Tube Devices ~1940, ENIAC was constructed at the Moore School of Electrical Engineering at the University of Pennsylvania. It consisted of 19,000 vacuum tubes, 1,500 relays, hundreds of thousands of resistors and capacitors; all told, including power supply and an air cooling system, it weighed over thirty tons and consumed 200 kilowatts of electrical power. Electronic numeric integrator and computer (ENIAC) (1946) $ 400.000

  4. Solid State Devices • Transistors (BJT, FET, etc.) • Semiconductor materials can generate and sense light  OPTOELECTRONIC DEVICES • They can also sense magnetism, temperature, pressure  variety of SENSOR devices and TRANSDUCERS (energy converters) appeared on the market.

  5. Although semiconductor diodes and transistors are still widely used as individual components, • 1959: Robert Noyce discovered that more than one transistor could be constructed on a single piece of semiconductor material. • Then other components (resistors, capacitors, etc.) were added with transistors and then interconnected to form a complete circuit on a single chip or piece of semiconductor material. Integrated Circuit (IC) or IC Chip

  6. Smaller and thinner than a dime, this tiny silicon chip contains millions of transistors that work together

  7. Steps • Growth of Semiconductor • Device Fabrication • Oxidation • Patterning (lithography, deposition, etching) • Packaging

  8. Growth of Semiconductors • Growth from a melt (Czochralski Method) • Epitaxial Growth: Chemical Vapor-Deposition, Liquid-Phase Epitaxy, Molecular Beam Epitaxy

  9. Growth From a Melt: Czochralski Method Cleaning, sectioning...

  10. Si Single Crystal Wafer

  11. Device Fabrication Techniques • Oxidation Gas Diffusion of oxygen SiO2 Silicon

  12. Photolithography

  13. MicrofabricationEtching & Deposition See «How do they make Silicon Wafers and Computer Chips?» at youtube Detail of an etch step Simplified illustration of the process of fabrication of a CMOS inverter on p-type substrate in semiconductor microfabrication

  14. Patterns created with subsequent layers of photoresist, elemental gas deposition, and/or etching and metal deposition.Source: wikicommons Schematic structure of a CMOS chip, as built in the early 2000s. 

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