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CMP at Tufts

CMP at Tufts. Dan Apone. Issue #1. Cameras had had enough Random dots on images So old that to fix them would require all new internals New cameras researched. Firewire Cameras. Evolution VF digital camera 12 bit Firewire connection to PC Prewritten Labview VI’s to control camera.

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CMP at Tufts

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  1. CMP at Tufts Dan Apone

  2. Issue #1 • Cameras had had enough • Random dots on images • So old that to fix them would require all new internals • New cameras researched

  3. Firewire Cameras • Evolution VF digital camera • 12 bit • Firewire connection to PC • Prewritten Labview VI’s to control camera

  4. Camera Mounting • New cams didn’t fit on old camera rig • Picture taken from severe angle; only part of image would be in focus • Solution:New mounting pointAttached to 80/20 beam, not rickety drum stand

  5. Actual Images

  6. Newest camera location

  7. Wafer mount updates • Allows placement of mirror for new camera location • Good temp solution, could be more rugged

  8. Laser info • Laser wouldn’t fire, called Big Sky Laser for help • Our thermal sensor was busted • Ordered new piece • Thanks to Scott’s technical skills, it was installed within a few hours

  9. Even more laser fun… • Laser still wouldn’t fire • Laser wanted pulses sent at 10 Hz • Pulses sent at 10 Hz, still nothing • Big Sky Laser said “use serial connection” • Serial worked well but we would now have to listen for output pulse from laser

  10. Solution: circuits

  11. Calibrations • Leftover slides seemed sloppily assembled • Severe curvature of slides would be nice to avoid

  12. Newest calibration? • 1mm thick microscope slide props up edge of wafer • Allows for typical downforce • Slurry interacts with asperities as during polishing run

  13. Software Updates • Labview controls it all now: laser + cameras • Programs now calculate image ratio, standard deviation, friction value, and time of laser pulses • All functions updated to Labview 7

  14. Most recent questions… • What effect is the pad having on our measurements?

  15. Setup Concerns • Drill press getting a bit sticky • Force table instead of separate downforce and friction measurements • Camera views only a dime sized portion of the wafer…(460 pixels per cm on wafer/platen)

  16. To Infinity…and Beyond! • Future work: • Solder circuit together • Change wafer mount…? • Leave out Calcein…? • Questions?

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