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Integrating Carbon Nanotube with Phase Change Memory

Integrating Carbon Nanotube with Phase Change Memory. Mentee – Yuan Dai Mentor – Feng Xiong. Timeline of Data Storage. MP3 player, photograph, e-mail, text message, documents, program code …. high-density low-power high speed robust data storage. Motivation.

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Integrating Carbon Nanotube with Phase Change Memory

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  1. Integrating Carbon NanotubewithPhase Change Memory Mentee – Yuan Dai Mentor –FengXiong

  2. Timeline of Data Storage MP3 player, photograph, e-mail, text message, documents, program code … high-density low-power high speed robust data storage

  3. Motivation Phase Change Memory - “Universal Memory” - Non-volatile - Fast access time - Large dynamic range - High endurance - High packing density - Radiation resistant R. Agarwalet al., Nat. Nano. , 2007

  4. Phase Change Material Crystalline • Chalcogenide compound: Ge2Sb2Te5 (GST) • 3 crystal states: amorphous, face center cubic , Hexagonal close packed • Fast crystallization time • Large contrast in optical and electrical properties • Promising candidate for random access memory (RAM) Amorphous A. Kolobov et al., Nat. Mater. (2004).

  5. Electrical & AFM Characterizations IDVG sweep: metallic or semi-conducting IDVD sweep : number of connections Keithley 4200

  6. CNT Interconnects for Lateral PCM Device Cu TiN GST SiO2 TiN • High bias  CNT breakdown • Oxidation (in air)  Nano-scale gap (30 ~ 300 nm) • GST deposition  Lateral GST cell with CNT electrodes (Heater) Cu Chen & Pop, IEEE Trans. Elec. Dev. (2009). CNT Breakdown in Air CNT gap

  7. Antifuse Device Schematics OFF state ON state 10nmGST • Typical CNT device • Electrical cutting of CNT – nano-scale gap • 10 nm GST deposition (DC sputtering) • Sputtered GST – amorphous phase and NOT conductive CNT Amorphous GST 70 nmSiO2 Crystalline GST 41 nmTi/Pd p+ Si

  8. Electrical & AFM Characterizations • Threshold switching at a • snapback voltage Vsb • Amorphous -> crystalline phase • change due to Joule heating • Switching current ~ 1 μA • Switching voltage 3 ~ 10 V • GST “bubble” formed in the • CNT gap

  9. COMSOL Multiphysics 3D FE model of the nanotube-PCM device ComsolMultiphysics

  10. COMSOL Multiphysics COMSOL Simulation Flowchart Determine Problem Type • COMSOL is a commercial software package for finite element analysis • Especially useful for coupled phenomena, or multiphysics applications • More powerful 3D version of MATLAB PDE Toolbox Set Geometry Set Physical Properties/Boundary Conditions Meshing Solve the Problem

  11. Acknowledgments My Mentor, FengXiong The P.U.R.E Committee All of You

  12. Thank You

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