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Vacuum Microfabrication on Live Fruit Fly. Anegal J. Shum and Babak A. Parviz University of Washington. IEEE International Conference on MEMS, 2007. Motivation. Fruit Fly: a sophisticated microsystem Energy storage, microactuation, sensing and decision making funtions
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Vacuum Microfabrication on Live Fruit Fly Anegal J. Shum and Babak A. Parviz University of Washington IEEE International Conference on MEMS, 2007
Motivation • Fruit Fly: a sophisticated microsystem • Energy storage, microactuation, sensing and decision making funtions • Current state of MEMS field unable to reproduce such complexity • Interface electronic circuits with insects and control their functions • Construction of hybrid micro-flying robots
Background • Model organism: Drosophila or Fruit Fly. • Widely used in developmental biology field • Life span four to six weeks: Focus on adult stage
Vacuum Survival • Pressures as low as 55 mTorr durations up to 70 minutes • Fruit flies gained consciousness within an hour • Younger flies survived more than older flies! • Hungry flies survived less than fed fries! • And Female flies survived more than male flies!
Patterning Process Fabrication Process
Live Fruit Fly after Thermal Evaporation 100 nm thick 50 μm wide Indium patterns evaporated at 1 mTorr for 30 minutes at 30° C 30% of flies survived!