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Introduction to Layout

Introduction to Layout. Jack Ou , Ph.D. CES 522 V VLSI Design Sonoma State University. Flow Chart. Cross Sectional of an Inverter. S. S. D. D. Mask Set. Basic Ingriedents. n-well (N_WELL) Polysilicon (POLY) n+ diffusion p+ diffusion contact metal. Manufacturing the n-well

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Introduction to Layout

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  1. Introduction to Layout Jack Ou, Ph.D. CES 522 V VLSI Design Sonoma State University

  2. Flow Chart

  3. Cross Sectional of an Inverter

  4. S S D D Mask Set

  5. Basic Ingriedents • n-well (N_WELL) • Polysilicon (POLY) • n+ diffusion • p+ diffusion • contact • metal

  6. Manufacturing the n-well • Grow a protective Layer of oxide. • Remove oxide in selected region • Ion Implantation

  7. Poly silicon (doped to make good conductor, Block n+ diffusion) • n-diffusion

  8. p-diffusion, contacts and metal Thick metal oxide provides insulation p+ diffusion is made selectively using silicon dioxide and photo resist

  9. λ • λ is half of the smallest feature size • In 0.18 um, λ is 0.09 um • λ based design rules makes it easy to migrate from one process to process. • Industrial design rules are usually specified in microns, which makes it difficult to migrate to a more advanced process.

  10. Simplified λ based design rules

  11. Example from tsmc 0.18 um process POLY has a width of 2 λ Contacts are 2 λ x 2 λ

  12. Design Rules

  13. Schematic/Layout of an Inverter VDD p+ diffision n+ diffision Ground

  14. Schematic/Layout of a NAND2 VDD p+ diffision n+ diffision Ground

  15. Substrate Contact

  16. P_WELL

  17. P_WELL+P_PLUS_SELECT

  18. P_WELL+P_PLUS_SELECT+Active(43)

  19. P_WELL+P_PLUS_SELECT+Active(43)+Contact to Active

  20. P_WELL+P_PLUS_SELECT+Active(43)+Contact to Active+Metal1

  21. Nwell Contact

  22. NWELL

  23. NWELL+N_Plus_Select+

  24. NWELL+N_Plus_Select+Active Layer

  25. NWELL+N_Plus_Select+ActiveLayer+Contact to Active Layer

  26. NWELL+N_Plus_Select+ActiveLayer+Contact to Active Layer+Metal 1

  27. DRC

  28. DRC Check: to run DRC First: to see the first DRC violation Next: to step through the DRC errors

  29. DRC Results DRC violation

  30. Use the Rule Deck to Repair the Layout

  31. Repaired Layout Enlarged N Plus Select Reduced Result Count

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