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Project Update June 22, 2006. ME342A. Project Goal. Design a bioMEMs substrate to apply and measure electromechanical forces in the differentiation of human embryonic stem cell-derived (hESC)-cardiac myocytes (CM). hESC-CMs organized in embryoid body. Contractility Electrophysiology
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Project UpdateJune 22, 2006 ME342A
Project Goal • Design a bioMEMs substrate to apply and measure electromechanical forces in the differentiation of human embryonic stem cell-derived (hESC)-cardiac myocytes (CM) hESC-CMs organized in embryoid body Contractility Electrophysiology Mechanical force Undifferentiated hESCs-Fluc-eGFP (DAPI nuclear stain) bioMEMS device
BioMEMS: Device Design Poly(dimethylsiloxane) (PDMS): A biocompatible elastomeric polymer with low water permeability Quartz: Optically transparent substrate Gold: Biocompatible thin film electrodes Indium-Tin Oxide (ITO): Transparent thin film conducting electrodes traces B. Strained state A. Unstrained state
BioMEMS: Loading Curves • Young’s Modulus PDMS E = 500kPa • Thickness = 50um • Membrane length = 1cm • Loading post length = 0.7cm
BioMEMS: Fabrication 1. Double polished quartz wafer ~ 500μm Quartz
BioMEMS: Fabrication 2. Laser cut alignment marks & pressure channels (frontside wafer) Channels etched to apply suction pressure to PDMS substrate Quartz
BioMEMS: Fabrication 3. Laser cut channels to connect to pressure lines (backside wafer) Channels backside to connect to vacuum source Quartz
Alternative Step—Replace 3 & 4 3a. Laser cut channels to connect to pressure lines (backside wafer) Channels frontside etch to connect to vacuum source *will require punch holes in PDMS layer, so need alignment marks on PDMS layer for this interface…same as uFluidic interconnect Quartz
BioMEMS: Fabrication 4. Bond a second quartz wafer to the first quartz wafer Channels backside to connect to vacuum source Quartz
BioMEMS: Fabrication 5. Fill with sacrificial layer—acrylate or agaraose. Squeeqy off. Channels backside to connect to vacuum source Quartz Sacrificial later
BioMEMS: Fabrication 6. Spin photoresist and expose area for second sacrificial layer (loading posts and vacuum channel are covered). Channels backside to connect to vacuum source Quartz Sacrificial later Photoresist
BioMEMS: Fabrication 7. Cast second sacrificial layer of acrylate Channels backside to connect to vacuum source Quartz Sacrificial later Photoresist
BioMEMS: Fabrication 8. Strip photoresist (should remove sacrificial layer from alignment marks here) and plasma surface area for PDMS Channels backside to connect to vacuum source Quartz Sacrificial later Photoresist
BioMEMS: Fabrication 9. Spin PDMS Quartz Sacrificial later Photoresist PDMS
BioMEMS: Fabrication 10. Spin photoresist Quartz Sacrificial later Photoresist PDMS
BioMEMS: Fabrication 10. Ebeam 20nm Ti (adhesion layer for gold and traces for electrodes) PDMS Titanium Quartz Sacrificial layer Photoresist
BioMEMS: Fabrication 11. Ebeam 150nm gold film (actual stretchable traces—geometry) PDMS Titanium Gold Quartz Sacrificial layer Photoresist
BioMEMS: Fabrication 12. Strip and pattern photo resist for PDMS Titanium Gold Quartz Sacrificial layer Photoresist
BioMEMS: Fabrication 13. Strip and pattern photo resist for electrodes, gauges, contact pads PDMS Titanium Gold Quartz Sacrificial layer Photoresist
BioMEMS: Fabrication 14. Ebeam gold electrodes PDMS Titanium Gold Quartz Sacrificial layer Photoresist
BioMEMS: Fabrication 15. Strip photoresist and passivate PDMS Titanium Gold Quartz Sacrificial layer Photoresist Passivation layer
BioMEMS: Fabrication 16. Dissolve sacrificial layer PDMS Titanium Gold Quartz Sacrificial layer Photoresist Passivation layer
BioMEMS: Stretchable Electrodes C. S. Park, M. Maghribi Characterizing the Material Properties of Polymer-Based Microelectrode Arrays for Retinal Prosthesis
Stimulation Electrodes • Goal: To pattern gold electrodes within a flow chamber for selectively stimulating hESCs • Electrodes 100μm x 5000μm (10 per well) • Interelectrode distance 1000μm • Contacts pads 2mm x 2mm (10 per well) • Polished glass wafers 1 mm thick
BioMEMS: Strain gauge • Need a strain gauge and a reference strain gauge for every deformable area.
Strain gauge design • Length (L = 1 mm) • Trace width (w = 50 um) • Distance between turns (p = 450 um) • Number of turns (t = 3—38) • Thickness of gold electrodes ~several hundred nm
Mechanical Strain • Goal: To apply cyclic mechanical strain to hESC precursor cells and observe differentiation
Next Steps • QFD write-up for Beth • Refine process cartoons • Define geometry of membrane and electrodes • ANSYS analysis of membrane and electrode deformation • Define redundant layers—ie, cover up alignment marks w/ foil • Creation of Ledit mask • Selection of machines • Training