Triggers Targets Experimental realisation Metrological application of basic science & technology

1. Dimensional metrology as enabling technology for long-term fundamental research Triggers Targets Experimental realisation Metrologicalapplication ofbasic science& technology Enablingscience &technology Research into fundamental constants, basic physics and future space science missions are critically dependent on dimensional metrology at levels of accuracy far exceeding those available kg @ 1*10-8 kB @ 10-7 kg @ 1*10-9 Enabling new definition of kg @ 2*10-8level based on fundamental constants Enabling progress of research into further fundamental constants and basic physics e.g.: G, h/m, (ST)EP… Enabling space metrology and positioning capabilities @ 10-15 Enabling new determination of kB @ 10-6 Ultra stable materials and position metrology in cryogenic environments Ultra stable structures for nano processing Improved instrumentation for dimensional measurements Specimen adapted interferometerPrecision velocity interferometer 3D metrology on artefacts: - pressure piston/cylinder area: ur < 10 nm - sphere resonator < 1 ppm- diaphragm area U < 10-5 length interferometry at the pm level Micro/Nano thruster positioning capability Surface effects Nano radian angle metrology Extended range (> 100 mm) high accuracy µCMM Prismatic ultra-stable reference artefacts Dilatometry & stability @ <10-10 level Surface layer characterization High speed simultaneous fringe fractioning & counting on multi-l X-ray & opt. interferometry @ 3*10-9 Precision dilatometry & stability measurements@ <10-9 level Higher power, reduced waveband fs comb technology Existing procedures, instruments and light sources for precision interferometry & long-range metrology. Improved temperature metrology New ultra stable materials 2005 2010 2015 2020

2. Dimensional metrology for advanced manufacturing technologies Triggers Targets Experimental realisation Metrologicalapplication ofbasic science& technology Enablingscience &technology Cost effective sustainable manufacturing of innovative products with structures down to 10 µm and up to 10 m, facing requirements of increased complexity, normative requirements, higher measuring speed and reduced tolerances Dimensional metrology < 10 m in measuring room (U < 10-7) in production environment (U < 10-6) Short range dimensional metrology 0.01 mm < L< 10 mm U < 0.005 µm U < 0.05 µm U < 0.01 µm Measuring instruments in labs for complex and freeform geometries Measuring instruments for 10 m-range under industrial conditions Measuring instruments for short range under industrial conditions Multi-parametric results from high resolution point clouds Automatic uncertainty evaluation (virtual instruments) Advanced traceability methods for in-process metrology Artefacts for small objects or those with non-cooperative surfaces Numerical artefacts – software datasets Research facilities for metrology in non-laboratory environment Probe-surface interaction including soft surfaces Influences of environment (refractive index, temperature, vibrations, dust,…) 3D-Segmentation and evaluation of large data files Fast and precise positioning (mechatronics, PZT motors,stick slip, DC, advanced servo controls Next generation of sensors and measuring instrumentation (Computer Tomography , indoor-GPS, Laser tracker, Laser interferometer, incremental scales, rangefinders/ADMS) Existing procedures, sensor principles, ... New materials, advanced computers and IT, ... 2005 2010 2015 2020

3. Long range dimensional metrology Triggers Targets Experimental realisation Metrologicalapplication ofbasic science& technology Enablingscience &technology Research into large scale production, global monitoring and waste management depend critically on dimensional parameters being measured or controlled to levels of accuracy that are currently unachievable over longer ranges (L > 10 m up to several km) 10-7 3D accuracy in large scale production Traceable verification of global mapping systems at 10-6 10-6 3D accuracy inlarge scale production 10-7 1D accuracy over long range in air 10-8 1D accuracy over long range in air Precision 3D measuring instruments and sensors up to 100 m range Advanced 3D measuring instruments up to 100 m Advanced refractometer Long range calibrated terrestrial baselines Long range free air refractometer Large scale coordinate metrology test & comparison facility High speed simultaneous fringe fractioning and counting on multi wavelengths Refractive index metrology over extended ranges Precision total stations with up to 1 km range Multi-wavelength ADM/ refractometry Multi-wavelength interferometry Metrological class precision laser trackers Existing metrology for long range 1D/2D: Laser trackers, ADM, total stations, µGPS, .. New light sources, e.g.:Higher power, reduced waveband fs comb technology 2005 2010 2015 2020

4. Dimensional metrology for micro-nano technology Triggers Targets Experimental realisation Metrologicalapplication ofbasic science& technology Enablingscience &technology European micro- and nano-technology is reaching increasing levels of miniaturisation and encountering new issues of health, production feasibility, quality and efficiency; for control and manuf. on µm/nm-scale metrology is needed! Nanoparticles: traceable counting, size, shape and distribution on 1 nm accuracy level Traceable 2D(3D) metrology at sub-nm accuracy over sub-mm range Traceable 2D(3D) metrology at (sub)-nm acc. over several 100 mm range Instrumentation for multi-parametrical characterization of new functional nano-materials Single probe 2D(3D) instrumentation with mm range Multi probe 2D(3D) instrumentation over longer range Traceable instrumentation for micro&nano-particles Cross calibration of sensors Improved & new high resolution microscopy methods Nanostandards over sub-mm range Nanostructured standardsover several 100 mm range Modelling of functional properties dependent on material and dimension Nanoparticle standards Probe surface interaction modelling New sensors/probes Correlation of local and global particle metrology methods 2D(3D) positioning capabilities; self calibration X-ray/optical interferometry, linear encoders Stable materials/structures & design principles, vacuum bearing technology, vacuum thermal metrology Nano force metrology Existing high resolution microscopy, position measurement, probes, data evaluation and micro/nano-fabrication methods (top-down) New technologies and materials (short wavelength lasers, nanotubes, …) Improved Nano fabrication (top down & bottom up) 2005 2010 2015 2020 2025