New Technology

1. New Technology A New MSE Evaluation Method

2. strength This technology can visualize nano-level. of materials at Even for samples which can not be evaluated so far… The World's First Method

3. Demands from fields of advancedtechnology LC・LED Cut・Grind organic thin film Layered thin film Fuel Cell・Solar cell Semiconductor Demands from fields of Advanced Technologies

4. If you need to know the surface strength of materials and thin films... Indentation Test Peeling Test Bending Test Tribology Test I can not evaluate the strength But… of nano-size smaples…

5. However, with the new MSE Method

6. Erosion by nano-size particle will evaluate the strength of materials Important Measurement of eroded surface Erosion Wear Strength can be evaluated by repeating this procedure.

7. nano-size Alumina particle AVE. 1.2μm Erosion Nozzle High speed collision of slurry(particles and water) This method will wear the surface at nano-level by nano-size particle

8. Erosion Profiling Precise control by a small nozzle Result zoom Evaluation of material strength with nano-particle erosion

9. Progress of wear Profile Superposition

10. Visualized graph of measurement result Strength of base material I can see the slope! Plotting the depth Strength of coating ＤＬＣ Test result Thickness of coating

11. How to use the ＭＳＥ?

12. The ＭＳＥ tester Usage method

13. Parts of the tester Control panel Collision box Slurry pot table

14. Setting slurry pot Mix MSE nano-particle with water in the slurry pot. Set the slurry pot on the pot table.

15. Setting a sample Sample Sample table Adjust the height. Set a sample on the sample arm.

16. ＭＳＥ erosion treatment Nozzle Automatic controlled collision under the set condition.

17. Profiling measurement Profilometer Profile

18. Repeat measurements Specify the wear depth! Wear Depth (μm) Profile Superposition

19. Wear curve Base Wear Depth　（µm） Coating Interface Collided particle amount　（g）

20. Wear rate curve Base Wear Rate　（µm/g） Coating Interface Wear Depth　（µm）

21. What can be measured?

22. ①This can measure the strength of thin film itself. ＤＬＣ Wear Graph Film thickness 420nm Film thickness 380nm Film thickness 300nm

23. This can measure the strength from the surface to deeper areas continuously. Chemical coating Wear graph Base Chemical coating Surface coating

24. This can measure the strength from the surface to deeper areas continuously. Lens of glasses Base Hard coating 700 600 Ground 500 400 Optical functional coating 300 200 100 0

25. This can measure the film thickness based on strength. TiN(2.8µm) TiC(0.6µm) WC For example, TiNmulti-layers like this・・・

26. This can measure the film thickness based on strength. WC Wear graph TiN TiC(0.6µm) TiC WC TiN(2.8µm) You can see the coating point of strength You can know the film thickness!

27. This can measure the film thickness based on strength Wear distribution TiN TiC TiN （Coating） TiC （Coating） WC （Base） WC You can know the distribution of strength in depth direction With the distribution graph of wear rate

28. This can measure the strength of interface Wear rate contribution

29. This can measure the strength of interface Wear rate contribution 100 80 60 Correlation between the strength distribution and mass content Mass content% W 40 Comparison with the mass content Elemental analysis result Ti 20 N Co C O 0 0 1 2 3 4 5 Wear Depth(μm)

30. Contribution to manufacturing

31. Contribution to development of coating technologies and quality control on abrasion surface Evaluation of sliding surface Contribution to manufacturing 　－ＭＳＥ－

32. Contribution to development of coating technologies and quality control on abrasion surfaces Evaluation of cutting tools Contribution to manufacturing 　－ＭＳＥ－

33. Technical development and quality control of super hard coating Evaluation of ＤＬＣ coating Contribution to manufacturing 　－ＭＳＥ－

34. Technical development and quality control of super hard coating Evaluation of ＣＶＤ Diamond Contribution to manufacturing 　－ＭＳＥ－

35. Technical development and quality control of super thin film coating Evaluation of LC oriented coating Contribution to manufacturing 　－ＭＳＥ－

36. Technical development and quality control of gradient coatings Evaluation of automotive parts Contribution to manufacturing 　－ＭＳＥ－

37. Technical development and quality control of gradient coatings Evaluation of optical functional coating Contribution to manufacturing 　－ＭＳＥ－

38. Technical development and quality control of hard and thin coating on plastics. Evaluation of coatings for touch screen Contribution to manufacturing 　－ＭＳＥ－

39. Technical development and quality control of hard and thin coating on plastics. Evaluation of coating on lens of glasses Contribution to manufacturing 　－ＭＳＥ－

40. Visualization will Visualization will create innovation. create innovation.

41. You can now measure parameters which you could not measure so far.

42. Too thin surface For unmeasurablesurfaces Too hard surface Too soft surface

43. Nano-particle erosion opened this new way for evaluation!

44. The MSE Method

45. Innovation will come! Downsizing Save the energy Save the resources

46. The MSE Method

47. 株式会社パルメソ Palmesoco., ltd.

48. Customization can be done to meet your application. ＭＳＥ Tester MSE-A MSE-S Full Automatic Type High Precision Type 株式会社パルメソ Palmesoco., ltd.