ITRS Winter Meeting: Taiwan ESH iTWG Update Dec. 5, 2012

1. ITRS Winter Meeting: Taiwan ESH iTWG Update Dec. 5, 2012 Steve Moffatt (AMAT) WG Co-Chair

2. Agenda • ESH TWG Membership • Background • Drivers • Vision and Scope • Current Status • Meeting Objectives • Key focus areas for 2013

3. Environmental, Safety & Health TWG Shane Harte (ESIA) Nausikaa van Hoornick (IMEC) Fiona Lyons (Intel) Harry Thewissson (NXP) Alain Pardon IMEC) Mario Chen (DuPont) Deb Kaiser (NIST) Kurt Werner (3M) Reyes Sierra (SRC ERC) Jim Field (SRC ERC) Srini Raghavan (SRC ERC) Slava Libman (Air Liquide) Paul Connor (Dow) Pete Trefonas (Dow) Tom Huang (SEMATECH) Dan Herr (UNC-G) Laura Mendocino (Freescale) Steve Brown (Intel) Toshi Matsuda (TEL) Gopal Rao (Intel) Dave Speed (IBM) Ken Wei (TSMC) Lone-Yee Yee (AMAT) Hsi-An Kwong (ISMI) Co-Chair Chris Lee (TI) Andreas Neuber (AMAT) Mary Majors (APCI) Masahiro Takemura (NIMS) Leo Kenny (Intel) Chair Alan Knapp (Siemens) Dave Maloney (Intermolecular) Terry Francis (Terry Francis Associates) Reed Content (GF) Francesca Illuzzi (Micron) Steve Tisdale (Intel) Hans-Peter Bipp (Infineon) Steve Moffat (AMAT) Co-Chair SJ Ko (Hynix) Laurie Beu (SEMATECH) Bob Helms (UT Dallas) Walter Worth (SEMATECH) Mike Garner (Stanford)

4. ESH Drivers Materials Suppliers/products Factory Emissions, Safety Production Equipment Natural resource usage Product Materials Assembly & Test Fab/ Sort Product End of Life Site operations • ESH is driven by site operations, product content, supply chain, brand impacts, regulatory requirements and natural resource usage • Ensure that the long term roadmap is not gated by EHS issues • Leverage unique industry technologies to proactively meet EHS challenges • Employ the concept of green (sustainable) chemistry as a framework methodology • Fully maximize opportunities for ESH innovation in the 300/450 transition

5. ESH Vision and Scope • OUR INDUSTRY MUST LEAD IN ESH • Identify key Technology Gaps (near and long term), provide direction and guidance • 450mm Inflection Point is a critical opportunity for EHS, turning in the right direction • We manage what we measure, lifecycle use • Drive comprehensive, long term approach and foster LEAN thinking • Incorporate a representative group of content experts amongst industry stakeholders (industry, academia, suppliers) • Avoid tactical, near term concerns and regulatory/compliance drivers/focus 2020-28 • Integrate Green/sustainable chemistry concept integration, is about applying a methodology

6. Current Status • Successful summer and winter meetings • Different ESH members attending each meeting • Sustainability and regulatory overview joint workshop with Factory Integration • Improved insertion matrix for new materials (excel based spreadsheet) • Developed high level plan for 2013 Roadmap • Kick-off of sub teams (working groups) in September completed • Logistics: Basecamp collaboration site active and up to date; all 2012 documents completed, significant expansion of the WG membership

7. ESH WG: Winter Meeting Objectives • Cross-cut meeting with key Technical WGs • Emphasis on proactive engagement and periodic meetings with the respective ESH sub team, dedicated to their WG • Defining key objectives for each WG in the 2013 roadmap • Technology gaps • Need for data in support of RM goals and requirements • Implications of nano-materials, 450 transition for the RM • Green Chemistry/Engineering WP development • Water is a priority as a LIMITED resource • Outputs for the conference • Key results from cross TWG discussions • Key message to WGs • Final Drafts of GC material, IRC and public presentation • Looking ahead to 2013 • Map out schedule of meetings, workshops, venues • Overview presentations on regional ESH sponsored research (identify gaps and areas of overlap) • 2013 Scope and Content of ESH Chapter • Sub team engagement strategies with the respective WGs • Finalize key messages to the G450c

8. Objectives for 2013 • Green/Sustainable Chemistry and Engineering (with ERM) • Develop and ratify White Paper • Begin implementation at the WG level • Align with EHS activities of SIA/WSC current regulatory/compliance landscape, ID key drivers • New materials insertion matrix to prioritize ESH activities • Develop high level roadmap strategy for key challenges: • Improved guidelines for G450C program • Nano-materials overview • Natural resource usage (water, energy) and sensor program • LEAN (efficiency) improvements • Drive reviews of each region’s ESH sponsored activities to minimize gaps and overlap between organizations • Further alignment with industry associations(e.g. roadmap integration with iNEMIand SEMI standards group) • Product materials content implications • Expand current expertise and bring in new capabilities to the WG • Metrology focus: capability assessment for ESH

9. Back-up

10. Sustainable/Green Chemistry • Definition: • The design of chemical products and processes that reduce or eliminate the use or generation of hazardous substances; applicable across the life cycle of a chemical product, including its design, manufacture, and use. • Concept already being applied in the chemical and pharma industries

11. Sustainable (Green) Chemistry Principles* Prevent waste Maximize atom economy Design less hazardous chemical syntheses Design safer chemicals and products Use safer solvents and reaction conditions Increase energy efficiency Use renewable feed stocks Avoid chemical derivatives Use catalysts, not stoichiometric reagents Design chemicals and products that degrade after use Analyze in real time to prevent pollution Minimize the potential for accidents * Anastas, P. T. and Warner, J. C. Green Chemistry: Theory and Practice, Oxford University Press: New York, 1998.

12. Strategies for implemention of Green/Sustainable Chemistry • Translation of GC Principles into a working methodology, across the technology Life Cycle • Need for a standardized framework, that accommodates the unique aspects of each functional area • Build on existing business processes, emphasizing HOW we develop new materials • Ensure that the complementary concept of green engineering is aligned with Green Chemistry Gopal Rao / Factory Integration - 2012

13. ERM ESH Key Focus: • What key “Green/Sustainable Chemistry” messages does the ESH TWG plans to include in the 2013 Chapter? write White Paper to define structure • Regular review of the ERM Earliest Intercept Table with TWGs and ESH • Review potential ESH materials and process material issues for applications in the 0-5 year timeframe. • Define the roadmap framework guidance for the industry on nanomaterials • Develop a roadmap for metrology needs, to enable the Roadmap and to proactively address ESH needs

14. FI ESH Key Issues • Energy conservation goals, metrics and timeline in Tables • Emerging regulatory requirements implication to FI • Green fabs sustainability issues – impact on facilities design • Define requirements for tool sensors and measurement of energy and resource consumption (max and avg) • Standards mapping, interface and development (SEMI) • Use of predictive tools and modeling • Integrating green engineering concepts with equipment suppliers, and alignment with green chemistry

15. Alignment and integration:research consortia scope • Supporting an ongoing effort, driven by the SIA on mapping out research, to identify gaps, overlap and improve communication/cooperation • Importance of expanding this effort to the other regions, for broader and strategic planning • Leverage ITRS unique role, in developing of long range planning for the industry • Apply LEAN thinking, green/sustainable chemistry and effective decision making for the 2013 roadmap and beyond Gopal Rao / Factory Integration - 2012

16. G450C Recommendations • Establish Single Point of Contact for G450C and ITRS ESH TWG • Balanced viewpoint of opportunities and challenges (i.e. emphasize how our technologies themselves can help address our ESH challenges) • Define information flow, key roles/responsibilities, scope and ESH goals/requirements, technology gaps, overall objectives up front • What are the tools needed for testing and characterization of the process • Comprehend abatement (scale-up issues?) and opportunities for integrated solutions based on regional requirements (i.e. heat recovery, combined waste streams, capturing/re-use of waste to suppliers, to tools) • Establish safety requirements that are needed (docs required, S2, S8?) • Use total life cycle approach • Integrate the concept of green engineering with green chemistry in the transition (establish the methodologies) • Ensure proliferation of key learnings to existing technologies • Innovative solutions for energy consumption in EUV, high gas (CO2, H2) usage, and safety of H2 usage, novel tool design, materials efficiency, heat recovery and energy conservation • Sensors for energy use and resource consumption are needed on 450mm tools with a focus on cost effectiveness (SEMI S23) • Prioritize water and He usage as LIMITED RESOURCES Gopal Rao / Factory Integration - 2012

17. Day 1 Meetings

18. Day 1 Meetings

19. Day 1 Meetings

20. Day 2 Meetings

21. Day 2 Meetings

22. Day 2 Meetings

23. Meeting minutes • Participants: FM Hsu, Ken Wei, Toshi Matsuda, Steve Moffatt, Andreas Neuber • Participation from Samsung • Participation from ASML, Nikon to get input about EUV • Abbreviations: Spelling out Risk management, Working program, Working Group • Management between different platforms incl. WSC (Reg issues), IHTESH, ISMI (Research), ITRS (Future) needs improvement AR • WSC: ROC F Hsu, Europe: Sean US: Reed Content, Korea • E.g. New WG Resource conservation Feb 2013, Chem Tim Yeakley, TI • List regional initiatives • 450 mm contact to be named (ISMI?) AR • ITRS shall meet WSC EHS (Reed Content, FM Hsu) Feb 2013, San Diego an coordinate future activities • Green Chemistry is another topic in WSC • Define hazardous substance (difference to dangerous substances) AR • Closed loop for waste recycling

24. Meeting minutes (cntnd) • Green Manufacturing Code: • TSMC, UMC, AUO, Chimei, Delta • FM Hsu will send standard • GC 450 mm shall incl. sensors or sampling/plug in points acc to SEMI S23, industry needs cost effective solutions • Develop survey for WSC interaction: expectations, data exchange etc. AR

25. Cross TWG: FI • Participants: Makoto Yamamoto, David CW Huang • Check with Al Chasey status of AR to provide details and FI action to define the criteria • Review or Green Fab sustainability during Spring meeting. WSC meeting will be used to capture regional input • PE, FICS to develop concept for energy/resource tool sensors (cost effective solution), Top 5 AR • PE, FICS to provide update about POU abatement DRE and uptiome tracking AR