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Devang Parekh 3/21/07 EE235

Highly Parallel Fabrication of Nanopatterned Surfaces with Nanoscale Orthogonal Biofunctionalization Imprint Lithography H. E. Gaubert and W. Frey, Nanotechnology 18 (2007) 135101. Devang Parekh 3/21/07 EE235. Overview. Motivation Fabrication Results Conclusion. Motivation.

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Devang Parekh 3/21/07 EE235

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  1. Highly Parallel Fabrication of Nanopatterned Surfaces with Nanoscale Orthogonal Biofunctionalization Imprint LithographyH. E. Gaubert and W. Frey, Nanotechnology 18 (2007) 135101 Devang Parekh 3/21/07 EE235

  2. Overview • Motivation • Fabrication • Results • Conclusion

  3. Motivation • Nanopatterned surfaces • Biosensors • Tissue engineering scaffolds • Bio-Mems • Self-assembly techniques • Pattern parameters • Pattern defects • Lack of dual functionality • E-beam and Ion-beam • Serial • Cost prohibitive

  4. Fabrication • Step and Flash (SFIL) • Quartz template • Bottom Antireflective Coating (BARC) planarization layer • BARC spin-coated 45nm • Low-viscosity resist • Photoresist fills template • Harden PR with UV exposure • Step M. Stewart, et. al, J. Microlith., Microfab., Microsyst. 4, 011002 (2005)

  5. Fabrication • O2 etch residual photoresist • 2nd O2 etch to transfer pattern to BARC • Evaporate 3nm of Cr • Evaporate 17nm of Au • Lift-off

  6. Fabrication • O2 plasma remove residual organics • Hexadecanethiol (HDT) • Polyethylene Glycol-silane (PEG-silane) • Fibronectin • Human umbilical vein endothelial cells (HUVECs)

  7. Results • AFM physico-chemical mapping • Force is random for untreated • HDT is hydrophobic • PEG is less hydrophilic than clean wafer • nm-resolution of physico-chemical differences

  8. Results

  9. Results

  10. Conclusion • Soft litho->micro NOBIL->nano • Orthogonal functionalization shown • Simple and cheap fabrication • Possible extension to glass or polymer substrates

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