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Engineering and Development of a Transportable ALD Reactor/ Measuring Growth of CeO 2

Engineering and Development of a Transportable ALD Reactor/ Measuring Growth of CeO 2. Adam Kueltzo Thornton Fractional North High School August 2nd, 2012 University of Illinois at Chicago Advanced Materials Research Laboratory ( AMReL )

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Engineering and Development of a Transportable ALD Reactor/ Measuring Growth of CeO 2

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  1. Engineering and Development of a Transportable ALD Reactor/ Measuring Growth of CeO2 Adam Kueltzo Thornton Fractional North High School August 2nd, 2012 University of Illinois at Chicago Advanced Materials Research Laboratory (AMReL) Mentors: SathessSelvaraj, Jorge Rossero, Dr. C.G. Takoudis, and Dr. G. Jursich Departments of Bioengineering and Chemical Engineering

  2. Purpose • Develop a plan for construction of an transportable atomic layer deposition (ALD) reactor • ALD reactor will be transported to Argonne National Laboratory • In-situ X-ray analysis at the Advanced Photon Source (APS)

  3. Experimental Station at APS

  4. Goals • Assess the current status of the ALD system in place • Vacuum pump completed …pressure…temperature… • Configuration completed…valves…gaskets…tubing • Flow meter control completed Other goals to will be met soon

  5. Vacuum Pump • Wasn’t pumping down to low enough pressure -30mTorr • Tested at machine shop and singled out problems in lab • Now pumping down to 10 mTorr • Called company and verified parameters

  6. Mass-flow meter calibration • Found that the flow rate measured was double that found on flowmeter controller. • Compared controller to bubble test. • Flowmeter 1 – 144-148 cc/min • Flowmeter 2 – 148-156 cc/min • Flowmeter 3 – 180-190 cc/min

  7. Flow Bubble Test

  8. Work still in progress • Must be designed for transportation • Precursor and water bubbler design • Metal framing for reactor • Exhaust pipe modification • Module and solenoid placement • Movable reactor • Finalize water delivery

  9. Precursor Bubbler

  10. Precursor Bubbler- Conflat-lid type Volume ~ 150 cc T ~ 200 0C P ~ 300 mTorr

  11. Water Bubbler

  12. Water Delivery Line From cylinder P MKS Flow meter To reactor Water bath 3-way valve

  13. Exhaust pipe modification

  14. Proposed modification

  15. System Schematic

  16. Purpose • Verify growth rate of Cerium Oxide using precursor- Tris(i-propylcyclopentadienyl)cerium • Possible use as electrolyte when Yttrium doped in Solid Oxide Fuel Cells (SOFC) • High ionic conductivity and lower operating temperature (700oC) • Allows for use of more readily available and cheaper materials

  17. Current ALD Status

  18. ALD Process • “One Cycle” • Precursor • Purge (N2) • Oxidizer (H2O) • Purge (N2) http://www.cambridgenanotech.com/

  19. Results

  20. Current Testing • TEM imaging taking place • 400 cycle sample • Annealed 600oC and 800oC • As deposited

  21. Acknowledgments • CBET-NSF Grant #1142255 • Mentors - Dr. Takoudis and Dr. Jursich • Doctoral Students - SathessSelvaraj and Jorge Rossero • Air Liquide

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