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PLASMA WAVES & DIFFUSION

PLASMA WAVES & DIFFUSION. •. μ ,. • SUMMARY OF PLASMA WAVES. (1). B O = 0. uncoupled. c s. IAW. (2) B O = 0 : coupled. c s ~v i. IA. IA : hot electron –shield ion - wave. (3) B o = 0. v A. UH. w LH =210. R. v A. w L. 200. L. C. EC. LH. 4. 4. W.

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PLASMA WAVES & DIFFUSION

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  1. PLASMA WAVES& DIFFUSION

  2. • μ ,

  3. • SUMMARY OF PLASMA WAVES (1) BO = 0 uncoupled cs IAW (2) BO = 0 : coupled cs~vi IA IA : hot electron –shield ion - wave (3) Bo = 0 vA UH wLH=210 R vA wL 200 L C EC LH 4 4 W IC MS 0.1 SA

  4. Almost (4) Bo = 0 C ICW Cs ~ MS

  5. wpi Cs 0 k

  6. Plasma Application Modeling, POSTECH Bohm velocity of bi-Maxwellian electron distribution 2006. 2.27 . G.J. Kim

  7. Plasma Application Modeling, POSTECH Godyak, IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 23, NO. 4, 728

  8. Plasma Application Modeling, POSTECH Ion velocity at the bulk-sheath boundary is correspond to the low energy electron group in case of bi-Maxwellian EEPF. 5mTorr, 0.2A, 40.12MHz

  9. Plasma Application Modeling, POSTECH Dispersion relation

  10. Plasma Application Modeling, POSTECH Dispersion relation

  11. H.S. Lee Ch.5 Diffusion(Transport) of Ptls, Heat, Momentum Classification -without or with plasma instabilities anomalous diffusion(defends on source type) our subject this ch. -weakly Ionized plasma vs Fully Ionized plasma collision of charged (high-Temp.) ptls e,I with abundant -no neutral neutral gas particles just collision of e,I (e-e, e-i,i-i) important! PECVD R.I.E. I.C.P.  D

  12. H.S. Lee MERIE E.C.R. Helicon (小) (大) (大) (小)

  13. S.E. Park •Mobility Diffusion Coeff () (D) from S.S Drift-Diffusion Approx.(PDP) •Ambipolar Diffusion -Definition: •MHD Eqs(conservation Forms) A single fluid Eq.for ⓔ & ⓘ Under E&B

  14. S.E. Park Transports(L&L) 5.1 (1.1) (1.2) (2) Other fluid eq (1.7) no source Field-free=Free Diffusion (p130) Const. For hi-pressure(pN) (p136) (1.9) Einstein rel (3) Third fluid eq  5.2 steady solutions (1-D slab) Three cases (2.19) Field free (2.20)  5.3 (2)Low-pN(but finit collisions) Solution (5.3.7)&Fig 5.2(b) (3)Collision-less Case(very-Low pN;Free-Fall solutions) (3.10)&Fig(5.3) Langmuir soln

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